公开(公告)号：WO2013160026A2

公开(公告)日：2013-10-31

申请号：PCT/EP2013/055662

申请日：2013-03-19

Applicant: ASML NETHERLANDS B.V.

Inventor： WILKLOW, Ronald ,  SCHMITZ, Roger ,  NOTENBOOM, Arnoud ,  WILL, Manon, Elise

IPC: G03F7/20

CPC classification number: G03F7/70708 ,  G03F7/70875 ,  H01L21/6831

Abstract: An electrostatic clamp configured to hold an object, the electrostatic clamp comprising an electrode, a resistive portion formed from a resistive material located on the electrode, and a dielectric portion formed from a dielectric material located on the resistive portion.

Abstract translation: 构造成保持物体的静电夹具，所述静电夹具包括电极，由位于所述电极上的电阻材料形成的电阻部分和由位于所述电阻部分上的电介质材料形成的电介质部分。