公开(公告)号：US20220328282A1

公开(公告)日：2022-10-13

申请号：US17726421

申请日：2022-04-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Yifeng SHAO ,  Maikel Robert GOOSEN

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/153 ,  H01J37/244

Abstract: A method of determining aberrations in images obtained by a charged-particle beam tool, comprising: a) obtaining two or more images of a sample, wherein each image is obtained at a known relative difference in a measurement condition of the charged-particle beam tool; b) selecting an estimated aberration parameter for the aberrations of a probe profile representing the charged-particle beam used by the charged-particle beam tool; c) evaluating an error function indicative of the difference between the two or more images and two or more estimated images that are a function of the estimated aberration parameter and the known relative difference in the measurement condition; d) updating the estimated aberration parameter; e) performing processes c) and d) iteratively; f) determining the final aberration parameter as the estimated aberration parameter that provides the smallest value of the error function.