公开(公告)号：WO2023061688A1

公开(公告)日：2023-04-20

申请号：PCT/EP2022/075525

申请日：2022-09-14

Applicant: ASML NETHERLANDS B.V.

Inventor： ZHU, Xuechen ,  TAZESH, Farshid ,  ZHANG, Datong ,  REN, Weiming

IPC: H01J37/244

Abstract: Some embodiments are related to a method of or apparatus for forming an image of a buried structure that includes: emitting primary charged particles from a source; receiving a plurality of secondary charged particles from a sample; and forming an image based on received secondary charged particles that have an energy within a first range.

公开(公告)号：WO2022189085A1

公开(公告)日：2022-09-15

申请号：PCT/EP2022/053092

申请日：2022-02-09

Applicant: ASML NETHERLANDS B.V.

Inventor： ZHANG, Datong ,  WANG, Chih-hung ,  PATTERSON, Oliver, Desmond ,  TANG, Xiaohu

IPC: G01R31/265

Abstract: Apparatuses, systems, and methods for providing beams for using deflector control to control charging on a sample surface of charged particle beam systems. In some embodiments, a controller including circuitry configured to scan a plurality of nodes of the sample to charge the plurality of nodes; adjust a scan rate of a beam such that a quantity of charge deposited on each node of the plurality of nodes varies with respect to at least one other node; generate a plurality of images; and compare the plurality of images to enable detection of a defect associated with any of the plurality of nodes of the sample.

公开(公告)号：WO2022023232A1

公开(公告)日：2022-02-03

申请号：PCT/EP2021/070780

申请日：2021-07-26

Applicant: ASML NETHERLANDS B.V.

Inventor： JEN, Chih-Yu ,  CHEN, Chien-Hung ,  MA, Long ,  LA FONTAINE, Bruno ,  ZHANG, Datong

IPC: H01J37/244

Abstract: A charged particle beam apparatus for inspecting a sample is provided. The apparatus includes a pixelized electron detector to receive signal electrons generated in response to an incidence of an emitted charged particle beam onto the sample. The pixelized electron detector includes multiple pixels arranged in a grid pattern. The multiple pixels may be configured to generate multiple detection signals, wherein each detection signal corresponds to the signal electrons received by a corresponding pixel of the pixelized electron detector. The apparatus further includes a controller includes circuitry configured to determine a topographical characteristic of a structure within the sample based on the detection signals generated by the multiple pixels, and identifying a defect within the sample based on the topographical characteristic of the structure of the sample.

公开(公告)号：EP4416752A1

公开(公告)日：2024-08-21

申请号：EP22783488.4

申请日：2022-09-14

Applicant: ASML Netherlands B.V.

Inventor： ZHU, Xuechen ,  TAZESH, Farshid ,  ZHANG, Datong ,  REN, Weiming

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J2237/244120130101 ,  H01J2237/2447520130101 ,  H01J2237/2448520130101 ,  H01J2237/05720130101

公开(公告)号：EP4555474A1

公开(公告)日：2025-05-21

申请号：EP23745408.7

申请日：2023-07-06

Applicant: ASML Netherlands B.V.

Inventor： JIN, Shengcheng ,  ZHANG, Datong ,  ZHU, Xuechen ,  JEN, Chih-Yu ,  TANG, Liang ,  YEH, Hsiang Ting

IPC: G06T7/00

公开(公告)号：EP4437577A1

公开(公告)日：2024-10-02

申请号：EP22809132.8

申请日：2022-10-26

Applicant: ASML Netherlands B.V.

Inventor： ZHANG, Datong ,  JI, Xiaoyu ,  REN, Weiming ,  LIU, Xuedong ,  LIN, Chia Wen

IPC: H01J37/10

CPC classification number: H01J2237/2456420130101 ,  H01J37/10 ,  H01J2237/2820130101 ,  H01J2237/1420130101