公开(公告)号：WO2023061688A1

公开(公告)日：2023-04-20

申请号：PCT/EP2022/075525

申请日：2022-09-14

Applicant: ASML NETHERLANDS B.V.

Inventor： ZHU, Xuechen ,  TAZESH, Farshid ,  ZHANG, Datong ,  REN, Weiming

IPC: H01J37/244

Abstract: Some embodiments are related to a method of or apparatus for forming an image of a buried structure that includes: emitting primary charged particles from a source; receiving a plurality of secondary charged particles from a sample; and forming an image based on received secondary charged particles that have an energy within a first range.

公开(公告)号：EP4555474A1

公开(公告)日：2025-05-21

申请号：EP23745408.7

申请日：2023-07-06

Applicant: ASML Netherlands B.V.

Inventor： JIN, Shengcheng ,  ZHANG, Datong ,  ZHU, Xuechen ,  JEN, Chih-Yu ,  TANG, Liang ,  YEH, Hsiang Ting

IPC: G06T7/00

公开(公告)号：EP4416752A1

公开(公告)日：2024-08-21

申请号：EP22783488.4

申请日：2022-09-14

Applicant: ASML Netherlands B.V.

Inventor： ZHU, Xuechen ,  TAZESH, Farshid ,  ZHANG, Datong ,  REN, Weiming

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J2237/244120130101 ,  H01J2237/2447520130101 ,  H01J2237/2448520130101 ,  H01J2237/05720130101