公开(公告)号：NL2005325A

公开(公告)日：2011-03-28

申请号：NL2005325

申请日：2010-09-08

Applicant: ASML NETHERLANDS BV

Inventor： BEURDEN MARTIJN

IPC: G01N21/47 ,  G03F7/20

公开(公告)号：NL2005521A

公开(公告)日：2011-04-26

申请号：NL2005521

申请日：2010-10-14

Applicant: ASML NETHERLANDS BV

Inventor： BEURDEN MARTIJN ,  SETIJA IRWAN ,  DIRKS REMCO

IPC: G01N21/47 ,  G03F7/20

Abstract: A projection operator framework is described to analyze the concept of localized normal-vector fields within field-material interactions in a spectral basis, in isotropic and anisotropic media. Generate a localized normal-vector field n in a region of the structure defined by the material boundary, decomposed into sub-regions with a predefined normal-vector field and possibly corresponding closed-form integrals. Construct a continuous vector field F using the normal-vector field to select continuous components ET and Dn. Localized integration of normal-vector field n over the sub-regions to determine coefficients of, C. Determine components Ex, Ey, Ez of the electromagnetic field by using field-material interaction operator C to operate on vector field F. Calculate electromagnetic scattering properties of the structure using the determined components of the electromagnetic field.