Patent search ap:("ASML NETHERLANDS BV") AND inv:"BILSEN FRANCISCUS BERNARDUS MARIA" Page 1

1.

发明专利
Lithographic method. 未知

公开(公告)号：NL1036096A1

公开(公告)日：2009-05-07

申请号：NL1036096

申请日：2008-10-21

Applicant: ASML NETHERLANDS BV

Inventor： BILSEN FRANCISCUS BERNARDUS MARIA , MOS EVERHARDUS CORNELIS

IPC: H01L21/68 , G03F9/00

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