Patent search ap:("ASML NETHERLANDS BV") AND inv:"COOGANS MARTYN JOHN" Page 1

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发明专利
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method. 未知

公开(公告)号：NL1036857A1

公开(公告)日：2009-10-22

申请号：NL1036857

申请日：2009-04-15

Applicant: ASML NETHERLANDS BV

Inventor： KERKHOF MARCUS ADRIANUS VAN DE , SCHAAR MAURITS VAN DER , FUCHS ANDREAS , COOGANS MARTYN JOHN

IPC: G03F7/20 , G01N21/47

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