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公开(公告)号：SG170759A1
公开(公告)日：2011-05-30
申请号：SG2011020773
申请日：2007-09-14
Applicant: ASML NETHERLANDS BV
Abstract: Both the 1st and 0th diffraction orders are detected in a scatterometer. The 1st diffraction orders are used to detect the overlay error. The 0th diffraction order is then used to flag if this is a false overlay error calculation of magnitude greater than the bias but smaller than the pitch of the grating. [Fig. 1] & [Fig. 4]
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