Patent search ap:("ASML NETHERLANDS BV") AND inv:"DOORN RONALD ALBERT JOHN VAN" Page 1

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发明专利
Method and lithographic apparatus for measuring and acquiring height data relating to a substrate surface. 未知

公开(公告)号：NL1036557A1

公开(公告)日：2009-09-14

申请号：NL1036557

申请日：2009-02-11

Applicant: ASML NETHERLANDS BV

Inventor： STAALS FRANK , TEUNISSEN PAULUS ANTONIUS ANDREAS , DOORN RONALD ALBERT JOHN VAN

IPC: G03F7/20 , G03F9/00 , H01L21/68

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