Patent search ap:("ASML NETHERLANDS BV") AND inv:"EBERT MARTIN" Page 1

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发明专利
A method of assessing a model, an inspection apparatus and a lithographic apparatus. 未知

公开(公告)号：NL1036734A1

公开(公告)日：2009-10-12

申请号：NL1036734

申请日：2009-03-19

Applicant: ASML NETHERLANDS BV

Inventor： BOEF ARIE JEFFREY DEN , CRAMER HUGO AUGUSTINUS JOSEPH , KERKHOF MARCUS ADRIANUS VAN DE , PELLEMANS HENRICUS PETRUS MARIA , EBERT MARTIN

IPC: G03F7/20 , G01N21/47 , H01L21/66

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