-
公开(公告)号：NL2005092A
公开(公告)日：2011-01-18
申请号：NL2005092
申请日：2010-07-15
Applicant: ASML NETHERLANDS BV
Inventor： SLOTBOOM DAAN , EIJCK PETRUS
IPC: G03F9/00
Abstract: A lithographic apparatus includes apparatus for measuring the alignment of an object. The measuring apparatus includes a plurality of alignment sensors, each including an alignment detector for measuring the position of an alignment mark over an alignment detection area. The measuring apparatus further includes a leveling sensor for measuring the height and/or tilt of an object in a leveling sensor detection area, and a feed-forward connection between said leveling sensor and said alignment sensors.
Search Results
1
records
(took 0.02 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
