公开(公告)号：NL2013249A

公开(公告)日：2015-02-23

申请号：NL2013249

申请日：2014-07-24

Applicant: ASML NETHERLANDS BV

Inventor： SCHMITT-WEAVER EMIL ,  HENKE WOLFGANG ,  HOOGENBOOM THOMAS ,  IZIKSON PAVEL ,  LUEHRMANN PAUL ,  SLOTBOOM DAAN ,  STAECKER JENS ,  YPMA ALEXANDER

IPC: G03F7/20

公开(公告)号：NL2008168A

公开(公告)日：2012-08-28

申请号：NL2008168

申请日：2012-01-24

Applicant: ASML NETHERLANDS BV

Inventor： LYULINA IRINA ,  SIMONS HUBERTUS ,  TENNER MANFRED ,  HERES PIETER ,  KEMENADE MARC ,  SANDEN STEFAN ,  SLOTBOOM DAAN

IPC: G03F7/20

Abstract: Estimating model parameters of a lithographic apparatus and controlling lithographic processing by a lithographic apparatus includes performing an exposure using a lithographic apparatus projecting a pattern onto a wafer. A set of predetermined wafer measurement locations is measured. Predetermined and measured locations of the marks are used to generate radial basis functions. Model parameters of said substrate are calculated using the generated radial basis functions as a basis function across said substrate. Finally, the estimated model parameters are used to control the lithographic apparatus in order to expose the substrate.

公开(公告)号：NL2005092A

公开(公告)日：2011-01-18

申请号：NL2005092

申请日：2010-07-15

Applicant: ASML NETHERLANDS BV

Inventor： SLOTBOOM DAAN ,  EIJCK PETRUS

IPC: G03F9/00

Abstract: A lithographic apparatus includes apparatus for measuring the alignment of an object. The measuring apparatus includes a plurality of alignment sensors, each including an alignment detector for measuring the position of an alignment mark over an alignment detection area. The measuring apparatus further includes a leveling sensor for measuring the height and/or tilt of an object in a leveling sensor detection area, and a feed-forward connection between said leveling sensor and said alignment sensors.

公开(公告)号：NL2011687A

公开(公告)日：2014-06-17

申请号：NL2011687

申请日：2013-10-29

Applicant: ASML NETHERLANDS BV

Inventor： SCHMITT-WEAVER EMIL ,  BOON EDUARDUS ,  HENKE WOLFGANG ,  KEA MARC ,  LUEHRMANN PAUL ,  SLOTBOOM DAAN ,  DAMME JEAN-PHILIPPE ,  YPMA ALEXANDER

IPC: G03F7/20