公开(公告)号：JP2006114888A

公开(公告)日：2006-04-27

申请号：JP2005266329

申请日：2005-09-14

Applicant: Asml Netherlands Bv ,  エイエスエムエル ネザランドズ ベスローテン フエンノートシャップ

Inventor： KOK HAICO V ,  KIVITS KOEN ,  DE LAAK RON VAN ,  KUIPER JOHANNES MARIA ,  ZOUW GERBRAND VAN DER ,  TOLSMA HOITE PIETER THEODOOR

IPC: H01L21/027 ,  G01B11/00 ,  G03F7/20

CPC classification number: G03F7/70666 ,  G03F7/709 ,  G03F9/7096

Abstract: PROBLEM TO BE SOLVED: To provide a system and a method for determining the vibration modes relating to a lithographic apparatus and a measure of respective magnitudes thereof. SOLUTION: In the method, vibration-related information is determined by projecting an aerial image at an image position in a projection plane, by mapping the intensity of the aerial image into an image map wherein the image map includes values of coordinates of sampling locations and of the intensity sampled at the respective sampling locations, and by measuring the intensity of the aerial image received through a slot pattern. The method further comprises a step for determining the detection position of an inclined portion of the image map from the image map, a step for measuring the temporal intensity of the aerial image at the detection position of the inclined portion and measuring the relative position between the slot pattern and the image position, and a step for determining vibration-related information relating to the aerial image from the temporal intensity of the aerial image. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种用于确定与光刻设备相关的振动模式的系统和方法以及其各自量度的测量。 解决方案：在该方法中，通过将空间图像的强度映射到图像映射中，通过将空间图像投影到投影平面中的图像位置来确定振动相关信息，其中图像映射包括 采样位置和在各采样位置采样的强度，以及通过测量通过时隙模式接收的空中图像的强度。 该方法还包括用于从图像映射确定图像映射的倾斜部分的检测位置的步骤，用于测量倾斜部分的检测位置处的空间图像的时间强度的步骤，并且测量其中的相对位置 槽图案和图像位置，以及从空中图像的时间强度确定与空中图像相关的振动相关信息的步骤。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2009218587A

公开(公告)日：2009-09-24

申请号：JP2009045257

申请日：2009-02-27

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： KIVITS KOEN ,  JANSEN HANS ,  MATTHIAS SERAO VASCO MIGUEL

IPC: H01L21/027 ,  G03F7/20

CPC classification number: G03F7/7085 ,  G03F7/70341 ,  G03F7/70925

Abstract: PROBLEM TO BE SOLVED: To provide a system which cleans an object located on a limited area on the upper surface of a substrate table or the upper surface of the substrate table. SOLUTION: An optical system used in an usual imaging is adjusted to limit a sectional area of a radiation beam and form a cleaning radiation beam correspondent to the limited area. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种清洁位于衬底台的上表面或衬底台的上表面上的有限区域上的物体的系统。 解决方案：调整在通常成像中使用的光学系统以限制辐射束的截面面积并形成与受限区域对应的清洁辐射束。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2009105417A

公开(公告)日：2009-05-14

申请号：JP2008308020

申请日：2008-12-02

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： KOK HAICO V ,  KIVITS KOEN ,  DE LAAK RON VAN ,  KUIPER JOHANNES MARIA ,  ZOUW GERBRAND VAN DER ,  TOLSMA HOITE PIETER THEODOOR

IPC: H01L21/027 ,  G01B11/00 ,  G03F7/20

CPC classification number: G03F7/70666 ,  G03F7/709 ,  G03F9/7096

Abstract: PROBLEM TO BE SOLVED: To provide a system and method for determining vibration modes and a measure for their respective magnitude for a lithographic apparatus. SOLUTION: The invention relates to a method for determining vibration-related information by projecting an aerial image at an image position in a projection plane, mapping an intensity of the aerial image into an image map, wherein the image map comprises values of coordinates of sampling locations and of the intensity sampled at each sampling location, and measuring intensity of the aerial image received through a slot pattern. The method further includes a step of determining, from the image map, a detection position of a slope portion of the image map, a step of measuring, at the detection position of the slope portion, a temporal intensity of the aerial image and measuring relative positions of the slot pattern and the image position, and a step of determining, from the temporal intensity of the aerial image, vibration-related information for the aerial image. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种用于确定振动模式的系统和方法以及其对于光刻设备的相应大小的度量。 解决方案：本发明涉及一种用于通过在投影平面中的图像位置处投射空中图像来确定振动相关信息的方法，将空中图像的强度映射到图像映射中，其中图像映射包括 采样位置的坐标和在每个采样位置处采样的强度，以及测量通过时隙模式接收的空间图像的强度。 该方法还包括从图像映射确定图像映射的斜率部分的检测位置的步骤，在倾斜部分的检测位置处测量空间图像的时间强度并测量相对的步骤 缝隙图案和图像位置的位置，以及从空间图像的时间强度确定用于空中图像的振动相关信息的步骤。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：NL1036571A1

公开(公告)日：2009-09-08

申请号：NL1036571

申请日：2009-02-13

Applicant: ASML NETHERLANDS BV

Inventor： KIVITS KOEN ,  JANSEN HANS ,  SERRAO VASCO MIGUEL MATIAS

IPC: G03F7/20

公开(公告)号：SG121102A1

公开(公告)日：2006-04-26

申请号：SG200505679

申请日：2005-09-08

Applicant: ASML NETHERLANDS BV

Inventor： KOK HAICO VICTOR ,  KIVITS KOEN ,  LAAK VAN DE RON ,  KUPER JOHANNES MARIA ,  ZOUW VAN DER GERBRAND ,  TOLSMA HOITE PIETR THEODOOR

Abstract: Method of measuring a position of an obj ect by performing a first position measurement on the object (WT) by a first sensor (AS) while the object is stationary and a second position measurement on the object by a second sensor (IF) while the object is stationary. The first and second position measurement are differing from one another. Both the first position measurement and the second position measurement comprise taking a plurality of samples in time and presenting the first measurement and the second measurement, wherein the method comprises: generating an alignment beam, directing the alignment beam to an alignment mark (AM) positioned on the object, receiving a reflected beam from the alignment mark by said first sensor, and measuring the reflected beam from the alignment mark with the first sensor. The measured intensity varies with the position of the object. The intensity as measured by the first sensor which varies with the position of the object has at least one of: a low intensity having a slope of substantially zero as function of the position at a first position, a high intensity having a slope of substantially zero as function of the position at a second position, and an intensity which is in between the intensities of the first and second position having a slope different from zero at a third position, wherein the first, second and third positions are determined by an alignment scan prior to the first and second position measurements