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1.发明专利
公开(公告)号：NL2013405A
公开(公告)日：2015-03-30
申请号：NL2013405
申请日：2014-09-03
Applicant: ASML NETHERLANDS BV
Inventor： HOUBEN MARTIJN , KOCK ALWIN , ABEELEN HENDRIKUS JOHANNES MARINUS , HEUVEL MARCO ADRIANUS PETER
IPC: G03F7/20 , H01L21/683
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