-
公开(公告)号：NL2005249A
公开(公告)日：2011-03-28
申请号：NL2005249
申请日：2010-08-19
Applicant: ASML NETHERLANDS BV
Inventor： ROOIJAKKERS WILHELMUS , WEHRENS MARTIJN
Abstract: A method for detecting radiation. The radiation detector includes a plurality of Faraday cups. Each Faraday cup being provided with a cover. Each cover comprising a window arrangement through which the radiation may pass into the Faraday cup. The window arrangement of each cover being different for each Faraday cup. Each Faraday cup housing a target configured to emit photoelectrons if the radiation is incident upon the target.
Search Results
1
records
(took 0.04 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
