公开(公告)号：JP2007150291A

公开(公告)日：2007-06-14

申请号：JP2006302217

申请日：2006-11-08

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： HOL SVEN ANTOIN SVEN ,  DE KLERK ANGELO C P ,  LOOPSTRA ERIK R ,  JACOBS FRANSICUS M ,  SCHOLTEN MARK ,  BAKKER ARJAN F

IPC: H01L21/027 ,  G03F7/20 ,  H01L21/68

CPC classification number: H02K41/03 ,  G03F7/70758 ,  H02K2201/18

Abstract: PROBLEM TO BE SOLVED: To provide a improved motor and a lithographic device provided with the improved motor. SOLUTION: This motor comprises a magneto assembly generating a magnetic field. The magnetic field has a plurality of portions, alternately oriented in a first direction and a second direction, along the first direction. The portions are extended in a third direction substantially perpendicular to the first direction and the second direction. The motor further comprises a first coil winding through which a first current flows. The first coil winding is extended in the first direction, at the part between the portions of the magnetic field oriented in the second direction, to generate a force in the first direction. The motor further comprises a second coil winding through which a second current flows. The second coil winding is extended in the first direction, at the part between the portions of the magnetic field substantially oriented in the first direction, to generate a force in the second direction. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供一种改进的电动机和设置有改进的电动机的光刻装置。 解决方案：该电动机包括产生磁场的磁组件。 所述磁场具有沿所述第一方向在第一方向和第二方向上交替取向的多个部分。 这些部分在基本上垂直于第一方向和第二方向的第三方向上延伸。 电动机还包括第一电流流过第一线圈绕组。 第一线圈绕组在沿第二方向取向的磁场部分之间的第一方向上延伸，以在第一方向上产生力。 电动机还包括第二电流流过的第二线圈绕组。 所述第二线圈绕组在所述第一方向上的所述磁场部分之间的部分沿第一方向延伸，以在所述第二方向上产生力。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：WO2008072031A3

公开(公告)日：2008-09-12

申请号：PCT/IB2006004286

申请日：2006-11-16

Applicant: ASML NETHERLANDS BV ,  HOL SVEN ANTOIN JOHAN ,  DE KLERK ANGELO CESAR PETER ,  LOOPSTRA ERIK ROELOF ,  JACOBS FRANSICUS MATHIJS ,  SCHOLTEN MARK

Inventor： HOL SVEN ANTOIN JOHAN ,  DE KLERK ANGELO CESAR PETER ,  LOOPSTRA ERIK ROELOF ,  JACOBS FRANSICUS MATHIJS ,  SCHOLTEN MARK

IPC: G03F7/20

CPC classification number: G03F7/70875 ,  F28D11/02 ,  G03F7/70758 ,  H02K9/22 ,  H02N13/00

Abstract: A cooling apparatus is disclosed that has a first cooling structure (220), in thermal contact with a heat source (210) having a temperature greater than a cool structure (250), comprising a channel through which a cooling fluid is passed, an isolator (230) between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and comprising a material of low thermal conductivity, and a second cooling (240) structure between the isolator and the cool structure, the second cooling structure comprising a channel through which cooling fluid is passed.

Abstract translation: 公开了一种冷却装置，其具有与具有大于冷结构（250）的温度的热源（210）热接触的第一冷却结构（220），包括冷却流体通过的通道，隔离器 （230），所述隔离器与所述第一冷却结构热接触并且包括低热导率的材料，以及所述隔离器和所述冷结构之间的第二冷却（240）结构，所述第二冷却 结构包括通过冷却流体的通道。

公开(公告)号：NL2009446A

公开(公告)日：2013-04-15

申请号：NL2009446

申请日：2012-09-11

Applicant: ASML NETHERLANDS BV

Inventor： VOSTERS PETRUS ,  SCHOLTEN MARK ,  MALAKHOVSKIY IIYA ,  CORTENBACH MARTINUS JOSEPHUS THEODORUS MARIA

IPC: G03F7/20

公开(公告)号：NL2002888A1

公开(公告)日：2009-12-15

申请号：NL2002888

申请日：2009-05-14

Applicant: ASML NETHERLANDS BV

Inventor： SCHOLTEN MARK ,  KLEIJN JACOB ,  LIBOUREL STEPHAN ,  UBBINK MARK

IPC: G03F7/20