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公开(公告)号：NL2003531A
公开(公告)日：2010-04-26
申请号：NL2003531
申请日：2009-09-23
Applicant: ASML NETHERLANDS BV
Inventor： VANGHELUWE RIK , PELLENS RUDY , DAVERVELD RALF , SINKWITZ STEPHAN
IPC: G03F7/20 , H01L21/027
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