Patent search ap:("ASML NETHERLANDS BV") AND inv:"VEN BASTIAAN LAMBERTUS WILHELM" Page 1

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发明专利
Lithographic apparatus and device manufacturing method. 未知

公开(公告)号：NL1036623A1

公开(公告)日：2009-09-29

申请号：NL1036623

申请日：2009-02-24

Applicant: ASML NETHERLANDS BV

Inventor： STARREVELD JEROEN PIETER , VEN BASTIAAN LAMBERTUS WILHELM

IPC: G03F7/20 , H01L21/68

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