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公开(公告)号：SG11201803933PA
公开(公告)日：2018-06-28
申请号：SG11201803933P
申请日：2016-11-29
Applicant: ASML NETHERLANDS BV
Inventor： SOCHA ROBERT , WALLOW THOMAS
IPC: G03F7/20
Abstract: A process of calibrating a model, the process including: obtaining training data including: scattered radiation information from a plurality of structures, individual portions of the scattered radiation information being associated with respective process conditions being characteristics of a patterning process of the individual structures; and calibrating a model with the training data by determining a ratio relating a change in one of the process characteristics to a corresponding change in scattered radiation information.
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