Patent search ap:("ASML NETHERLANDS BV") AND inv:"WIJN ERWIN" Page 1

1.

发明专利
PLANAR MOTOR AND LITHOGRAPHIC APPARATUS COMPRISING SUCH PLANAR MOTOR. 未知

公开(公告)号：NL2008379A

公开(公告)日：2012-10-02

申请号：NL2008379

申请日：2012-02-29

Applicant: ASML NETHERLANDS BV

Inventor： HOL SVEN ANTOIN JOHAN , BUIS EDWIN , WIJN ERWIN

IPC: G03F7/20 , H02K41/03

Patent Agency Ranking