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    OPTICAL APPARATUS, AND METHOD OF ORIENTING A REFLECTIVE ELEMENT.
    2.
    发明专利
    OPTICAL APPARATUS, AND METHOD OF ORIENTING A REFLECTIVE ELEMENT. 未知

    公开(公告)号：NL2004527A

    公开(公告)日：2011-02-28

    申请号：NL2004527

    申请日：2010-04-09

    Applicant: ASML NETHERLANDS BV

    Inventor： BUIS EDWIN ,  VRIES GOSSE ,  BOON FIDELUS

    IPC: G03F7/20

    Abstract: An optical apparatus has a moveable reflective element and associated actuator. The actuator includes a first magnet which is connected to the moveable reflective element such that movement of the first magnet will cause the moveable reflective element to move, and a second magnet which is connected to a motor such that operation of the motor will cause the second magnet to move. The second magnet is positioned relative to the first magnet such that moving the second magnet will cause the first magnet to move.

    ACTUATOR SYSTEM, LITHOGRAPHIC APPARATUS, METHOD OF CONTROLLING THE POSITION OF A COMPONENT AND DEVICE MANUFACTURING METHOD.
    6.
    发明专利
    ACTUATOR SYSTEM, LITHOGRAPHIC APPARATUS, METHOD OF CONTROLLING THE POSITION OF A COMPONENT AND DEVICE MANUFACTURING METHOD. 未知

    公开(公告)号：NL2003751A

    公开(公告)日：2010-06-15

    申请号：NL2003751

    申请日：2009-11-04

    Applicant: ASML NETHERLANDS BV

    Inventor： VRIES GOSSE ,  BUIS EDWIN ,  MICKAN UWE

    IPC: G03F9/00 ,  H01L21/68

    Abstract: An actuator system is provided that is configured to move a component relative to a base of the actuator system. The actuator system may include first and second actuating elements, each including two sections of material that are joined to each other and have different coefficients of thermal expansion. The two actuating elements may be configured such that if the temperature of one is increased it applies a force on the component in a direction that is opposite to the force applied by the other actuating element if its temperature is increased. The actuator system may further include at least one power supply configured to provide independently controllable heating to the first and second actuating elements.

    ACTUATION MECHANISM, OPTICAL APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING DEVICES.
    9.
    发明专利
    ACTUATION MECHANISM, OPTICAL APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING DEVICES. 未知

    公开(公告)号：NL2011456A

    公开(公告)日：2014-04-16

    申请号：NL2011456

    申请日：2013-09-17

    Applicant: ASML NETHERLANDS BV

    Inventor： BUIS EDWIN ,  VRIES GOSSE ,  HOL SVEN ,  REKKERS ERIK

    IPC: G03F7/20 ,  H01L21/68

    Abstract: An EUV optical apparatus includes a number of adjustable mirrors (22x) on mirror bodies (120). Each mirror body is supported on an actuator (100x) comprising a moving part (132, 134, 136) and a fixed casing part (128, 130). The actuator provides a resilient support (140, 142) for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (166, 170-178) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling (102, 104a, 104b) is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation.

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