公开(公告)号：SG11202106369RA

公开(公告)日：2021-07-29

申请号：SG11202106369R

申请日：2019-11-26

Applicant: ASML NETHERLANDS BV

Inventor： REN WEIMING ,  ZHANG QIAN ,  HU XUERANG ,  LIU XUEDONG

IPC: H01J37/147

Abstract: A multi-beam inspection apparatus including an improved source conversion unit is disclosed. The improved source conversion unit may comprise a micro-structure deflector array including a plurality of multipole structures. The micro-deflector deflector array may comprise a first multipole structure having a first radial shift from a central axis of the array and a second multipole structure having a second radial shift from the central axis of the array. The first radial shift is larger than the second radial shift, and the first multipole structure comprises a greater number of pole electrodes than the second multipole structure to reduce deflection aberrations when the plurality of multipole structures deflects a plurality of charged particle beams.