公开(公告)号：US20240274400A1

公开(公告)日：2024-08-15

申请号：US18643379

申请日：2024-04-23

Applicant: ASML Netherlands B.V.

Inventor： Marcus Adrianus VAN DE KERKHOF ,  Jing ZHANG ,  Martijn Petrus Christianus VAN HEUMEN ,  Patriek Adrianus Alphonsus Maria BRUURS ,  Erheng WANG ,  Vineet SHARMA ,  Makfir SEFA ,  Shao-Wei FU ,  Simone Maria SCOLARI ,  Johannes Andreas Henricus Maria JACOBS

IPC: H01J37/20 ,  B01D19/00 ,  F16L11/04 ,  F16L11/12 ,  H01L21/67

CPC classification number: H01J37/20 ,  F16L11/04 ,  F16L11/12 ,  B01D19/0068 ,  H01J2237/2001 ,  H01L21/67288

Abstract: Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer; a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.

公开(公告)号：US20210257181A1

公开(公告)日：2021-08-19

申请号：US17179165

申请日：2021-02-18

Applicant: ASML Netherlands B.V.

Inventor： Marcus Adrianus VAN DE KERKHOF ,  Jing ZHANG ,  Martijn Petrus Christianus VAN HEUMEN ,  Patriek Adrianus Alphonsus Maria BRUURS ,  Erheng WANG ,  Vineet SHARMA ,  Makfir SEFA ,  Shao-Wei FU ,  Simone Maria SCOLARI ,  Johannes Andreas Henricus Maria JACOBS

IPC: H01J37/20 ,  C23C16/27 ,  C23C16/40 ,  C23C16/06 ,  C23C16/50 ,  B05D1/00

Abstract: Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer; a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.

公开(公告)号：US20250012855A1

公开(公告)日：2025-01-09

申请号：US18712464

申请日：2022-10-28

Applicant: ASML Netherlands B.V.

Inventor： Dongchi YU ,  Erheng WANG ,  Jun-li LIN ,  Shao-Wei FU ,  Yi-Chen LIN

IPC: G01R31/28 ,  G01R31/307

Abstract: Systems and structures for venting and flow conditioning operations in charged particle beam systems. In some embodiments, a system may include a chamber configured to provide a vacuum environment; a vent valve; and a mass flow controller coupled to the chamber on a first side of the mass flow controller and to the vent valve on a second side of the mass flow controller.