公开(公告)号：JP2003240930A

公开(公告)日：2003-08-27

申请号：JP2002035994

申请日：2002-02-13

Applicant: ATR ADVANCED TELECOMM RES INST

Inventor： KUBOTA KAZUYOSHI ,  PABLO BACCALO ,  AIDA TADAHITO

IPC: G02B26/08 ,  B81B3/00 ,  G02B5/08 ,  G02B5/122 ,  G02B5/136 ,  G02B7/198

Abstract: PROBLEM TO BE SOLVED: To provide a reflector in which three reflection layers are exactly combined at a specified angle, and which is miniaturized and is easily manufactured and a manufacturing method therefor. SOLUTION: The reflection layers 6 at a first, a second, and a third region 601, 602, 603 are separated from the reflection layer 6 at a peripheral region by a separation groove 11. The first region 601 is bent in a valley shape with respect to a substrate 1 by a valley-like bent groove 10. The first region 610 and the second region 602 are bent in the valley shape by the valley-like bent groove 10, respectively. The third region 603 is bent in the valley shape with respect to the substrate 1 by the valley-like bent groove 10. The second region 602 and the third region 603 are bent in a mountain shape by a mountain like- bent line 20. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2003133583A

公开(公告)日：2003-05-09

申请号：JP2001331274

申请日：2001-10-29

Applicant: ATR ADVANCED TELECOMM RES INST

Inventor： PABLO BACCALO ,  KUBOTA KAZUYOSHI ,  AIDA TADAHITO

IPC: G01C1/00 ,  G01B11/26 ,  H01L27/14 ,  H01L31/10 ,  H01L31/16

Abstract: PROBLEM TO BE SOLVED: To provide a direction detection element capable of being miniaturized and thinned down and accurately detecting the direction of incident light, and a manufacturing method therefor. SOLUTION: Four rectangular contact pads 201-204 are respectively arranged on four PIN photodiodes formed on a substrate. Among the contact pads 201-204, four walls 301-304 radially extended at an angle of 90 degrees to each other with a reference point P as a center are provided. A recess 10 is formed along one side of the walls 301-304 and a groove 11 is formed along the other side and the side around an end part. Rectangular light receiving areas 101-104 of the PIN photodiodes are respectively formed so as to be adjacent through the recess 10 to one side of the walls 301-304. By curving the walls 101-104 along the recess 10, the walls 101-104 are vertically erected.