公开(公告)号：AU2003259989A8

公开(公告)日：2004-03-11

申请号：AU2003259989

申请日：2003-08-21

Applicant: AXCELIS TECH INC

Inventor： TAO DAVID ,  BROWN DOUGLAS ,  MEADOWS ROBERT DAVID ,  KOCH MATHIAS

IPC: G01J5/00 ,  G01J5/02 ,  G01J5/06 ,  G01J5/08 ,  H01L21/00 ,  H01L21/66

Abstract: The present invention provides a pyrometer system with a tube having a top portion and a bottom portion associated. A pyrometer head is associated with the bottom portion of the elevator tube, and operable to transmit and receive radiation through the tube. A sleeve is connected with the top portion of the elevator tube. A lens, having a focal length which is a function of temperature, and which is related to a distance of a work piece positioned from the lens, is coupled to the sleeve. The sleeve has a coefficient of thermal expansion, and alters the distance between the lens and the work piece due to the coefficient of thermal expansion as a function of temperature to compensate for changes in the focal length of the lens due to variations in temperature.

公开(公告)号：AU2003259989A1

公开(公告)日：2004-03-11

申请号：AU2003259989

申请日：2003-08-21

Applicant: AXCELIS TECH INC

Inventor： BROWN DOUGLAS ,  MEADOWS ROBERT DAVID ,  TAO DAVID ,  KOCH MATHIAS

IPC: G01J5/00 ,  G01J5/02 ,  G01J5/06 ,  G01J5/08 ,  H01L21/00 ,  H01L21/66

Abstract: The present invention provides a pyrometer system with a tube having a top portion and a bottom portion associated. A pyrometer head is associated with the bottom portion of the elevator tube, and operable to transmit and receive radiation through the tube. A sleeve is connected with the top portion of the elevator tube. A lens, having a focal length which is a function of temperature, and which is related to a distance of a work piece positioned from the lens, is coupled to the sleeve. The sleeve has a coefficient of thermal expansion, and alters the distance between the lens and the work piece due to the coefficient of thermal expansion as a function of temperature to compensate for changes in the focal length of the lens due to variations in temperature.

公开(公告)号：WO2004019386A3

公开(公告)日：2004-06-17

申请号：PCT/US0326278

申请日：2003-08-21

Applicant: AXCELIS TECH INC

Inventor： BROWN DOUGLAS ,  MEADOWS ROBERT DAVID ,  TAO DAVID ,  KOCH MATHIAS

IPC: G01J5/00 ,  G01J5/02 ,  G01J5/06 ,  G01J5/08 ,  H01L21/00 ,  H01L21/66

CPC classification number: G01J5/08 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/02 ,  G01J5/0255 ,  G01J5/04 ,  G01J5/045 ,  G01J5/046 ,  G01J5/061 ,  G01J5/0806 ,  G01J5/084 ,  G01J5/0846 ,  G01J5/0875 ,  G01J5/0893 ,  H01L21/67248

Abstract: The present invention is directed to a pyrometer system and comprises an elevator tube. The elevator tube comprises an inner tube and an outer tube surrounding the inner tube in telescoping arrangement and extending from a top to a bottom thereof, the arrangement defining a fluid passageway therebetween. The elevator tube further comprises a port associated with the outer tube that is operable to transmit a cooling gas therethrough into the fluid passageway. A pyrometer head is coupled to the bottom of the inner tube and is operable to transmit and receive radiation through the inner tube. The system further comprises a spider collar coupled to at least one of a top of the inner tube or outer tube, and is operable to support a work piece for thermal measurement thereof. In another embodiment, a sleeve having a coefficient of thermal expansion is provided at the top portion of the elevator tube, so that temperature dependent changes in the focal length of a lens associated with the sleeve are compensated.

Abstract translation: 本发明涉及一种高温计系统，包括电梯管。 电梯管包括内管和外管，其围绕内管以伸缩布置并从其顶部延伸到底部，该布置在其间限定了流体通道。 电梯管还包括与外管相关联的端口，其可操作以将冷却气体通过其传送到流体通道中。 高温计头部连接到内管的底部并且可操作以通过内管传送和接收辐射。 所述系统还包括联接到所述内管或外管的顶部中的至少一个的蜘蛛环，并且可操作以支撑用于其热测量的工件。 在另一个实施例中，具有热膨胀系数的套筒设置在电梯管的顶部，从而补偿与套筒相关联的镜片的焦距随温度的变化。