公开(公告)号：WO2004027448A3

公开(公告)日：2004-09-30

申请号：PCT/US0330099

申请日：2003-09-23

Applicant: AXCELIS TECH INC

Inventor： SCHERER ERNST

IPC: G04F10/00 ,  G04F10/10 ,  H01J37/317 ,  G01P3/66 ,  H01J37/30 ,  H01J37/302 ,  H01J49/40

CPC classification number: H01J37/3171 ,  G04F10/00 ,  G04F10/10 ,  H01J2237/05 ,  H01J2237/30472

Abstract: Apparatus and methods are disclosed for measuring time delays between pulse streams or other input signals and for measuring ion beam energies in an ion implantation system. A variable delay apparatus is applied to one input signal, and the signals are correlated or compared in a correlator apparatus providing a minimum, maximum, or other ascertainable output signal value when a delay value of the variable delay is representative of the time delay between the first and second input signals. By adjusting or sweeping the variable delay until the ascertainable correlator apparatus output value is obtained, the actual time delay is determined as the dialed-in value of the variable delay that produces the ascertainable correlator output value. The variable delay measurement apparatus and methods may be employed in ion implantation system for measuring ion beam energies using time of flight probes, wherein the system and the time delay measurement apparatus may be calibrated to remove any residual delays of the system, such as delay offsets related to channel imbalance in the system and connecting devices. In addition, a unique error correction method is disclosed, which may be applied to the time delay measurement system measurement to minimize or mitigate errors introduced by electronic components of the system.

Abstract translation: 公开了用于测量脉冲流或其他输入信号之间的时间延迟并用于测量离子注入系统中的离子束能量的设备和方法。 可变延迟装置被应用于一个输入信号，并且当可变延迟的延迟值表示时间延迟之间的时间延迟时，在提供最小值，最大值或其他可确定的输出信号值的相关器装置中相关或比较信号。 第一和第二输入信号。 通过调整或扫描可变延迟直到获得可确定的相关器装置输出值，将实际时间延迟确定为产生可确定的相关器输出值的可变延迟的拨入值。 可变延迟测量设备和方法可以用于使用飞行时间探测器测量离子束能量的离子注入系统中，其中系统和时间延迟测量设备可以被校准以去除系统的任何滞留延迟，诸如延迟偏移 与系统和连接设备中的通道不平衡有关。 另外，公开了一种独特的错误校正方法，其可以应用于时间延迟测量系统测量以最小化或减轻由系统的电子组件引入的错误。