OPTICAL TRAIN ALIGNMENT PROCESS UTILIZING METROLOGY AND PLASTIC DEFORMATION
    3.
    发明申请
    OPTICAL TRAIN ALIGNMENT PROCESS UTILIZING METROLOGY AND PLASTIC DEFORMATION 审中-公开
    光学对准方法利用计量学和塑性变形

    公开(公告)号:WO02065178A3

    公开(公告)日:2003-03-20

    申请号:PCT/US0201184

    申请日:2002-01-14

    Abstract: A micro-optical train manufacturing process includes a step of characterizing the position of optical components (114) on an optical bench (130), typically using a metrology system. These optical components (114) are then aligned with respect to each other in a passive alignment step (250) based on data from the metrology system and optical system design information. As a result, a subsequent active align process (260) can be avoided in some situations, or if a subsequent active alignment process (260) is performed, the time required for that active alignment process (260) can be reduced because of this initial metrology-based passive alignment step (250).

    Abstract translation: 微型光学系统制造方法包括通常使用计量系统来表征光学平台(130)上的光学部件(114)的位置的步骤。 基于来自计量系统和光学系统设计信息的数据,这些光学部件(114)然后在被动对准步骤(250)中相对于彼此对准。 结果,在一些情况下可以避免随后的主动对准过程(260),或者如果执行后续的主动对准过程(260),那么由于该初始化可以减少该主动对准过程(260)所需的时间 基于计量的被动对准步骤(250)。

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