MECHANICALLY BALANCED OPTICAL MEMBRANE DEVICE FOR ORIENTATION INSENSITIVITY
    2.
    发明申请
    MECHANICALLY BALANCED OPTICAL MEMBRANE DEVICE FOR ORIENTATION INSENSITIVITY 审中-公开
    用于定向灵敏度的机械平衡光学膜装置

    公开(公告)号:WO2013170056A1

    公开(公告)日:2013-11-14

    申请号:PCT/US2013/040384

    申请日:2013-05-09

    CPC classification number: G02B26/001 G02B26/0825

    Abstract: An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.

    Abstract translation: 光学膜装置包括基底,在基底表面上的至少一个支撑块和至少一个板。 扭力梁将支撑块上的基板上方的板支撑。 光学膜装置还包括由基板上方的板支撑的光学膜结构和在板下方的基板上的至少一个电极。 在一个实施方式中,光学膜装置还包括用于将光学膜结构耦合到板的系绳。 系绳在光学膜结构和板之间延伸。 在另一实施方式中,光学膜装置的基板具有通过光学膜结构正下方的基板的光学端口。 该板在扭转梁周围基本平衡,以最小化对重力场中的取向的敏感性。

    SILICON OPTICAL BENCH OCT PROBE FOR MEDICAL IMAGING
    4.
    发明授权
    SILICON OPTICAL BENCH OCT PROBE FOR MEDICAL IMAGING 有权
    SILICON OPTICAL BENCH OCT探针用于医学成像

    公开(公告)号:EP2528495B1

    公开(公告)日:2018-03-28

    申请号:EP11702756.5

    申请日:2011-01-25

    Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens.

    SILICON OPTICAL BENCH OCT PROBE FOR MEDICAL IMAGING
    5.
    发明公开
    SILICON OPTICAL BENCH OCT PROBE FOR MEDICAL IMAGING 有权
    SIOB OCT探头用于医学成像

    公开(公告)号:EP2528495A2

    公开(公告)日:2012-12-05

    申请号:EP11702756.5

    申请日:2011-01-25

    Abstract: An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens.

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