公开(公告)号：WO2013170056A1

公开(公告)日：2013-11-14

申请号：PCT/US2013/040384

申请日：2013-05-09

Applicant: AXSUN TECHNOLOGIES, INC.

Inventor： MATHUR, Vaibhav ,  FLANDERS, Dale C. ,  WHITNEY, Peter S. ,  GETZ, James W.

IPC: G01J3/26 ,  G02B26/00 ,  G02B26/08

CPC classification number: G02B26/001 ,  G02B26/0825

Abstract: An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.

Abstract translation: 光学膜装置包括基底，在基底表面上的至少一个支撑块和至少一个板。 扭力梁将支撑块上的基板上方的板支撑。 光学膜装置还包括由基板上方的板支撑的光学膜结构和在板下方的基板上的至少一个电极。 在一个实施方式中，光学膜装置还包括用于将光学膜结构耦合到板的系绳。 系绳在光学膜结构和板之间延伸。 在另一实施方式中，光学膜装置的基板具有通过光学膜结构正下方的基板的光学端口。 该板在扭转梁周围基本平衡，以最小化对重力场中的取向的敏感性。