公开(公告)号：EP3112844B1

公开(公告)日：2018-09-19

申请号：EP16176083.0

申请日：2016-06-24

Applicant: Agilent Technologies, Inc.

Inventor： Ghetler, Andrew ,  Kleczewski, Adam ,  Tella, Richard P.

IPC: G01N21/27 ,  G01J3/42 ,  G01N21/3563 ,  G01N21/55 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28 ,  G01N21/47

CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/108 ,  G01J3/2823 ,  G01J3/42 ,  G01N21/274 ,  G01N21/276 ,  G01N21/3563 ,  G01N21/4785 ,  G01N21/55 ,  G01N2201/101 ,  G01N2201/1042 ,  G01N2201/127

Abstract: A method and apparatus for obtaining reference samples, i.e. measuring reference targets (62) on a reference stage (61) during the generation of a mid-infrared (MIR) image without requiring that a sample specimen (16), being placed on a specimen stage (57) and imaged, be removed is disclosed. A tunable MIR laser (11) generates a light beam (18) that is focused onto the sample specimen on the specimen stage that moves the specimen in a first direction (33). An optical assembly includes a scanning assembly (31) having a focusing lens (55) and a mirror (56) that moves in a second direction (32), different from the first direction, relative to the specimen stage. A light detector (13) measures an intensity of light leaving the point on the specimen. A controller (39) forms an image from the measured intensity. The reference stage (61) is positioned such that the scanning assembly moves over the reference stage in response to a command so that the controller can also make a reference measurement.

公开(公告)号：EP3112844A1

公开(公告)日：2017-01-04

申请号：EP16176083.0

申请日：2016-06-24

Applicant: Agilent Technologies, Inc.

Inventor： Ghetler, Andrew ,  Kleczewski, Adam ,  Tella, Richard P.

IPC: G01N21/27 ,  G01J3/42 ,  G01N21/3563 ,  G01N21/47 ,  G01N21/55

CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/108 ,  G01J3/2823 ,  G01J3/42 ,  G01N21/274 ,  G01N21/276 ,  G01N21/3563 ,  G01N21/4785 ,  G01N21/55 ,  G01N2201/101 ,  G01N2201/1042 ,  G01N2201/127

Abstract: A method and apparatus for obtaining reference samples, i.e. measuring reference targets (62) on a reference stage (61) during the generation of a mid-infrared (MIR) image without requiring that a sample specimen (16), being placed on a specimen stage (57) and imaged, be removed is disclosed. A tunable MIR laser (11) generates a light beam (18) that is focused onto the sample specimen on the specimen stage that moves the specimen in a first direction (33). An optical assembly includes a scanning assembly (31) having a focusing lens (55) and a mirror (56) that moves in a second direction (32), different from the first direction, relative to the specimen stage. A light detector (13) measures an intensity of light leaving the point on the specimen. A controller (39) forms an image from the measured intensity. The reference stage (61) is positioned such that the scanning assembly moves over the reference stage in response to a command so that the controller can also make a reference measurement.

Abstract translation: 一种用于获得参考样本的方法和装置，即在产生中红外（MIR）图像期间在参考台（61）上测量参考目标（62），而不需要将样本（16）放置在样本 公开了阶段（57）并被成像。 可调谐MIR激光器（11）产生聚焦在样品台上的样品样本上的光束（18），样品台沿第一方向（33）移动样本。 光学组件包括具有聚焦透镜（55）的扫描组件（31）和相对于样品台沿与第一方向不同的第二方向（32）移动的反射镜（56）。 光检测器（13）测量离开样品点的光的强度。 控制器（39）根据测量的强度形成图像。 基准台（61）被定位成使得扫描组件响应于命令移动到参考台上，使得控制器也可进行参考测量。