公开(公告)号：US20160090297A1

公开(公告)日：2016-03-31

申请号：US14502475

申请日：2014-09-30

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy ,  George M. Molnar ,  Christopher R. Needham ,  Kemiao Jia

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0048

Abstract: A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.

Abstract translation: MEMS产品包括由应力消除间隙围绕并从衬底悬挂的应力隔离MEMS平台。 应力消除间隙提供阻挡机械应力从基板传递到平台的障碍。