OPTICAL SYSTEM FOR NOISE MITIGATION
    1.
    发明申请

    公开(公告)号:WO2022056142A1

    公开(公告)日:2022-03-17

    申请号:PCT/US2021/049683

    申请日:2021-09-09

    Applicant: APPLE INC.

    Abstract: Configurations for a photonics assembly design and methods for mitigating coherent noise thereof are disclosed. The photonics assembly may include a set of light sources, an optical subsystem that may include a set of optical elements, and a diffusing element. The light emitted by the set of light sources may be different wavelengths and the light may be de-cohered by a phase shifter before being received by the set of optical elements. The diffusing element may be moveable and may be capable of repeating the same positions or set of positions for each beam of light emitted by the set of light sources. By combining the coherent noise mitigation techniques of the moveable diffusing element and the de-cohered light, the photonics system may provide an illumination profile with a specific spatial profile and angular profile on the sample that allows reliable measurement of the sample and coherent noise mitigation.

    OPTICAL MEASUREMENT SYSTEM WITH MULTIPLE LAUNCH SITES

    公开(公告)号:EP4249894A2

    公开(公告)日:2023-09-27

    申请号:EP23163015.3

    申请日:2023-03-21

    Applicant: Apple Inc.

    Abstract: Various embodiments disclosed herein describe optical measurement systems for characterizing a sample. The optical measurement systems may selectively emit light from different numbers of launch groups, and may include a multi-stage optical switch network that may be controlled to route light to a desired number of launch groups. The optical measurement systems may further measure light using a corresponding number of detector groups. The optical measurement systems may perform measurements using a plurality of different wavelengths, where different groups of these wavelengths may be measured using different numbers of launch groups (as well as corresponding detector groups).

    OPTICAL INSPECTION SYSTEM AND METHOD INCLUDING ACCOUNTING FOR VARIATIONS OF OPTICAL PATH LENGTH WITHIN A SAMPLE
    5.
    发明公开
    OPTICAL INSPECTION SYSTEM AND METHOD INCLUDING ACCOUNTING FOR VARIATIONS OF OPTICAL PATH LENGTH WITHIN A SAMPLE 审中-公开
    光学检测系统和方法,包括考虑样品内光程长度的变化

    公开(公告)号:EP3213053A1

    公开(公告)日:2017-09-06

    申请号:EP15825998.6

    申请日:2015-12-22

    Applicant: Apple Inc.

    Abstract: An illuminator/collector assembly can deliver incident light to a sample and collect return light returning from the sample. A sensor can measure ray intensities as a function of ray position and ray angle for the collected return light. A ray selector can select a first subset of rays from the collected return light at the sensor that meet a first selection criterion. In some examples, the ray selector can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light that traverse within the sample an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample, such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample can improve accuracy.

    Abstract translation: 照明器/收集器组件(104)可以将入射光(106)传送到样本(102)并且收集从样本(102)返回的返回光(112)。 传感器(114)可以测量作为收集的返回光(112)的射线位置和射线角度的函数的射线强度。 光线选择器可以选择来自传感器(114)处收集的符合第一选择标准的返回光(112)的第一射线子集。 在一些示例中,光线选择器可以将光线强度聚合成箱,每个箱对应于在光学路径长度的相应范围内的估计光学路径长度内在收集的返回光(112)内穿过样本(102)内的光线。 表征器可以基于射线强度,射线位置以及射线第一子集的射线角度来确定样本(102)的物理属性,例如吸收率。 考虑样本内穿过的光程长度变化可以提高精度。

    DESPECKLING IN OPTICAL MEASUREMENT SYSTEMS
    6.
    发明公开

    公开(公告)号:EP4343374A1

    公开(公告)日:2024-03-27

    申请号:EP23197128.4

    申请日:2023-09-13

    Applicant: Apple Inc.

    Abstract: Embodiments are directed to optical measurement systems that utilize multiple emitters to emit light during a measurement, as well as methods of performing measurements using these optical measurement systems. The optical measurement systems may include a light generation assembly that is configured to generate light via a light source unit, and a photonic integrated circuit that includes a launch group having a plurality of emitters. Each of these emitters is optically coupled to the light generation assembly to receive light generated from the light generation assembly, and may emit this light from a surface of the photonic integrated circuit. The optical measurement system may perform a measurement in which the light generation assembly generates light and each of the plurality of emitters simultaneously emit light received from the light generation assembly.

    OPTICAL MEASUREMENT SYSTEM WITH MULTIPLE LAUNCH SITES

    公开(公告)号:EP4249894A3

    公开(公告)日:2023-10-04

    申请号:EP23163015.3

    申请日:2023-03-21

    Applicant: Apple Inc.

    Abstract: Various embodiments disclosed herein describe optical measurement systems for characterizing a sample. The optical measurement systems may selectively emit light from different numbers of launch groups, and may include a multi-stage optical switch network that may be controlled to route light to a desired number of launch groups. The optical measurement systems may further measure light using a corresponding number of detector groups. The optical measurement systems may perform measurements using a plurality of different wavelengths, where different groups of these wavelengths may be measured using different numbers of launch groups (as well as corresponding detector groups).

    OPTICAL INSPECTION SYSTEM AND METHOD INCLUDING ACCOUNTING FOR VARIATIONS OF OPTICAL PATH LENGTH WITHIN A SAMPLE

    公开(公告)号:EP4220134A1

    公开(公告)日:2023-08-02

    申请号:EP23165899.8

    申请日:2015-12-22

    Applicant: Apple Inc.

    Abstract: An illuminator/collector assembly (104) can deliver incident light (106) to a sample (102) and collect return light (112) returning from the sample (102). A sensor (114) can measure ray intensities as a function of ray position and ray angle for the collected return light (112). A ray selector (116) can select a first subset of rays from the collected return light (112) at the sensor (114) that meet a first selection criterion. In some examples, the ray selector (116) can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light (112) that traverse within the sample (102) an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample (102), such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample (102) can improve accuracy.

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