公开(公告)号：US20200283900A1

公开(公告)日：2020-09-10

申请号：US16808046

申请日：2020-03-03

Applicant: Applied Materials, Inc.

Inventor： Sumit AGARWAL ,  Chad PETERSON ,  Marc SHULL

IPC: C23C16/455

Abstract: A showerhead assembly includes a support structure and a porous plate. The support structure includes a support feature. The porous plate has a thermal conductivity of at least about 50 W/(mK) and includes a plurality of pores having an average diameter of less than about 100 um, wherein at least a portion of a perimeter of the porous plate rests on the support feature. The showerhead may be included within a processing chamber that is utilized to process a substrate.

公开(公告)号：US20220380898A1

公开(公告)日：2022-12-01

申请号：US17745156

申请日：2022-05-16

Applicant: Applied Materials, Inc.

Inventor： Sumit AGARWAL ,  Sanjeev BALUJA ,  Chad PETERSON ,  Michael R. RICE

IPC: C23C16/455 ,  B23K1/00

Abstract: A gas distribution plate for a showerhead assembly of a processing chamber may include at least a first plate and second plate. The first plate may include a first plurality holes each having a diameter of at least about 100 um. The second plate may include a second plurality of holes each having a diameter of at least about 100 um. Further, each of the first plurality of holes is aligned with a respective one of the second plurality of holes forming a plurality of interconnected holes. Each of the interconnected holes is isolated from each other interconnected holes.

公开(公告)号：US20200308703A1

公开(公告)日：2020-10-01

申请号：US16802293

申请日：2020-02-26

Applicant: Applied Materials, Inc.

Inventor： Sumit AGARWAL ,  Sanjeev BALUJA ,  Chad PETERSON ,  Michael R. RICE

IPC: C23C16/455 ,  B23K1/00

Abstract: A gas distribution plate for a showerhead assembly of a processing chamber may include at least a first plate and second plate. The first plate may include a first plurality holes each having a diameter of at least about 100 um. The second plate may include a second plurality of holes each having a diameter of at least about 100 um. Further, each of the first plurality of holes is aligned with a respective one of the second plurality of holes forming a plurality of interconnected holes. Each of the interconnected holes is isolated from each other interconnected holes.