公开(公告)号：US20240240304A1

公开(公告)日：2024-07-18

申请号：US18537234

申请日：2023-12-12

Applicant: Applied Materials, Inc.

Inventor： David Jorgensen ,  David Soltz

IPC: C23C14/08 ,  C23C14/06 ,  C23C14/54

CPC classification number: C23C14/083 ,  C23C14/0694 ,  C23C14/548

Abstract: Described herein is a chamber component including a metal oxy-fluoride coating including YF3, ZrF4 or combination thereof and a metal oxide consisting of Y2O3 and ZrO2. The metal oxy-fluoride coating includes 5 mol % to 90 mol % of YF3 or ZrF4 and 10 mol % to 95 mol % of the metal oxide. The metal oxy-fluoride coating is amorphous and has:





35
-
50
⁢


at
.

%

⁢

of
⁢


yttrium
⁢




(
Y
)


;







0.3
-
10
⁢


at
.

%

⁢

of
⁢


zirconium
⁢




(
Zr
)


;







5
-
57
⁢


at
.

%

⁢

of
⁢


oxygen
⁢




(
O
)


;
and






3
-
65
⁢


at
.

%

⁢

of
⁢



fluorine
⁢




(
F
)

.