公开(公告)号：US10665476B2

公开(公告)日：2020-05-26

申请号：US14335415

申请日：2014-07-18

Applicant: Applied Materials, Inc.

Inventor： Efrain Quiles ,  Mehran Behdjat ,  Robert B. Lowrance ,  Michael R. Rice ,  Brent Vopat

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687 ,  F24F9/00

Abstract: In one aspect, a valve assembly adapted to seal an opening in a chamber is disclosed. Valve assembly includes a housing being adapted for coupling to a chamber surface having the opening therein, the housing including a threshold portion positioned adjacent to the chamber opening, the threshold portion having one or more inlets adapted to supply gas to an interior region of the housing adjacent to the chamber opening; and a sealing surface adapted to selectively (1) seal the opening, and (2) retract from the opening so as not to obstruct substrate passage. Numerous other system aspects are provided, as are methods and computer program products in accordance with these and other aspects.

公开(公告)号：US20150013771A1

公开(公告)日：2015-01-15

申请号：US14335415

申请日：2014-07-18

Applicant: Applied Materials, Inc.

Inventor： Efrain Quiles ,  Mehran Behdjat ,  Robert B. Lowrance ,  Michael R. Rice ,  Brent Vopat

IPC: H01L21/67 ,  F24F9/00

Abstract: In one aspect, a valve assembly adapted to seal an opening in a chamber is disclosed. Valve assembly includes a housing being adapted for coupling to a chamber surface having the opening therein, the housing including a threshold portion positioned adjacent to the chamber opening, the threshold portion having one or more inlets adapted to supply gas to an interior region of the housing adjacent to the chamber opening; and a sealing surface adapted to selectively (1) seal the opening, and (2) retract from the opening so as not to obstruct substrate passage. Numerous other system aspects are provided, as are methods and computer program products in accordance with these and other aspects.

Abstract translation: 一方面，公开了一种适于密封腔室中的开口的阀组件。 阀组件包括适于联接到其中具有开口的腔室表面的壳体，壳体包括邻近腔室开口定位的阈值部分，阈值部分具有适于将气体供应到壳体的内部区域的一个或多个入口 邻近室开口; 以及适于选择性地（1）密封开口的密封表面，和（2）从开口缩回以不妨碍基板通过。 提供了许多其他系统方面，以及根据这些和其他方面的方法和计算机程序产品。