公开(公告)号：US20140197322A1

公开(公告)日：2014-07-17

申请号：US14115326

申请日：2012-05-02

Applicant: Applied Materials Israel Ltd.

Inventor： Haim Eder ,  Nissim Elmaliach ,  Igor Krayvitz (Krivts) ,  Mario Mützel

IPC: G01T1/20 ,  G01J1/04

CPC classification number: G01T1/2002 ,  G01J1/0425 ,  G01N21/253 ,  G01N21/62 ,  G01N21/6452 ,  G01N2201/0833 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2445 ,  H01J2237/2446

Abstract: Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.

Abstract translation: 用于检测从物体上的点阵列发射的光辐射的装置。 该装置包括具有各自的输入端和输出端的多个光导，其输入端被排列成对应于斑点阵列的几何布置。 继电器光学器件将来自物体的光学辐射聚焦并聚焦到输入端上，使得每个输入端从相应的一个光点接收光学辐射。 多个检测器，每个检测器被耦合以从相应的一个光导的输出端接收光辐射。