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Patent Agency Ranking
公开(公告)号：US20240280805A1
公开(公告)日：2024-08-22
申请号：US18112876
申请日：2023-02-22
Applicant: Applied Materials Israel Ltd.
Inventor： Menachem LAPID , Nitzan CHAMIEL
CPC classification number: G02B27/0025 , G02B13/0095 , G02B21/02
Abstract: The presently disclosed subject matter provides a method for aligning an objective and a pupil relay module of a microscope. The objective is configured to introduce an objective aberration component and the pupil relay module is configured to have a corresponding pupil relay module aberration component such that the pupil relay module aberration component compensates said objective aberration component when the pupil relay module is accurately aligned with the objective. The method comprises: (a) measuring a combined aberration indicator indicative of a combined aberration resulting from the optical combination of the objective and pupil relay module; (b) adjusting an optical alignment of the objective and pupil relay module based on the measured combined aberration indicator; (c) iterating (a) and (b) until the measured combined aberration indicator reaches a predetermined combined aberration indicator target thereby achieving accurate alignment.
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公开(公告)号：US20250102446A1
公开(公告)日：2025-03-27
申请号：US18896800
申请日：2024-09-25
Applicant: Applied Materials Israel Ltd.
Inventor： Menachem LAPID
Abstract: The present disclosure relates to a method of providing a light signal separation unit in an optical reflective microscope system, said optical reflective microscope system comprising an objective lens arrangement configured to collect light reflected off a plurality of field points on an object and to onwardly transmit a light beam formed from the collected light and said light signal separation unit having a reflective surface with a central transmissive region formed therein, wherein said central transmissive region is arranged to allow therethrough a central portion of said light beam transmitted from said objective lens arrangement while said reflective surface is arranged to reflect a peripheral portion of said light beam transmitted from said objective lens arrangement. The method comprises determining an axial position at which to position said light signal separation unit. The axial position being a position along an optical axis of said objective lens arrangement, contiguous to an exit pupil of said objective lens arrangement, at which beam deformation of said light beam is substantially minimal; determining a dimension of a cross section of said light beam at said axial position; and determining a dimension of said central transmissive region based on said dimension of said cross section of said light beam and said lateral displacement at said axial position.
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公开(公告)号：US20250102793A1
公开(公告)日：2025-03-27
申请号：US18896780
申请日：2024-09-25
Applicant: Applied Materials Israel Ltd.
Inventor： Menachem LAPID
Abstract: The present disclosure relates to a method of designing an objective lens arrangement for an optical microscope system, said objective lens arrangement being configured, in use, to collect light from a plurality of field points on an object and to onwardly transmit a light beam formed from the collected light, the method comprising: (a) providing an objective lens; (b) tracing, for the plurality of field points, a light cone from each field point through said objective lens arrangement; (c) determining a marginal ray and a chief ray for said light cone from each field point exiting said objective lens arrangement and monitoring said marginal ray relative to said chief ray for each light cone exiting said objective lens arrangement; (d) determining an exit pupil contour for said objective lens arrangement respective of each field point and monitoring an overlap of exit pupil contours respective of said plurality of field points; (e) determining an exit pupil magnification with respect to an entrance pupil of said objective lens arrangement for each field point and monitoring a deviation in said exit pupil magnification respective of said plurality of field points; (f) adjusting one or more physical parameters of said objective lens arrangement; and (g) repeating one or more of (b) to (f) until said marginal ray relative to said chief ray for each light cone exiting said objective lens arrangement are substantially parallel, said overlapping is substantially maximised, and said deviation in said exit pupil magnification is substantially minimised.
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公开(公告)号：US20250060573A1
公开(公告)日：2025-02-20
申请号：US18233833
申请日：2023-08-14
Applicant: Applied Materials Israel Ltd.
Inventor： Menachem LAPID
IPC: G02B21/00
Abstract: A system for scanning a surface including: an illumination system providing inspection light for illumination of a field of view (FOV) on an inspection object to produce a reflected light beam from the inspection object; an objective lens arrangement, located between the illumination system and the surface; a light separator: having a reflective surface arranged: to direct the inspection light towards the FOV; and to receive and change a direction of brightfield light comprising a central portion of the reflected light beam; and sized and shaped to allow therearound darkfield light comprising a peripheral portion of the reflected light beam; a holder configured to provide mechanical support to the light separator, having a first portion attached to the light separator and a second portion extending away from the light separator.
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公开(公告)号：US20240255436A1
公开(公告)日：2024-08-01
申请号：US18104231
申请日：2023-01-31
Applicant: Applied Materials Israel Ltd.
Inventor： Mariano ABRAMSON , Uzi BARAZANI , Menachem LAPID
CPC classification number: G01N21/8806 , G01N21/9501 , G02B21/02 , G02B21/125 , G02B21/18 , G02B27/0012 , G01N2201/0636 , G01N2201/121
Abstract: A wafer inspection tool comprising an illumination system having: a field of view (FOV); a light source pupil having a size and shape; a central optical axis; and one or more field angle defining a shape of said FOV extending away from said light source pupil; an objective lens arrangement including an objective and a plurality of interchangeable telescopes coupled thereto, the objective lens arrangement being configured to collect light reflected off a plurality of field points on the wafer and to onwardly transmit a light beam formed from the collected light; and a light separator having a first reflective surface with a transmissive region formed therein and a second surface, wherein said transmissive region is arranged to allow therethrough a central portion of said light beam transmitted from said objective lens arrangement corresponding to the brightfield channel while said reflective surface is arranged to reflect a peripheral portion of said light beam transmitted from said objective lens arrangement corresponding to the darkfield channel; a relay module configured to relay said light source pupil to said transmissive region; wherein said transmissive region has a shape defined as a geometric intersection volume between a model of said illumination light and said reflective surface and said second surface; wherein said model includes a plurality of solids each solid having a cross section of said light source pupil and angled to a field angle of said one or more field angle.
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