公开(公告)号：US20240280805A1

公开(公告)日：2024-08-22

申请号：US18112876

申请日：2023-02-22

Applicant: Applied Materials Israel Ltd.

Inventor： Menachem LAPID ,  Nitzan CHAMIEL

IPC: G02B27/00 ,  G02B13/00 ,  G02B21/02

CPC classification number: G02B27/0025 ,  G02B13/0095 ,  G02B21/02

Abstract: The presently disclosed subject matter provides a method for aligning an objective and a pupil relay module of a microscope. The objective is configured to introduce an objective aberration component and the pupil relay module is configured to have a corresponding pupil relay module aberration component such that the pupil relay module aberration component compensates said objective aberration component when the pupil relay module is accurately aligned with the objective. The method comprises: (a) measuring a combined aberration indicator indicative of a combined aberration resulting from the optical combination of the objective and pupil relay module; (b) adjusting an optical alignment of the objective and pupil relay module based on the measured combined aberration indicator; (c) iterating (a) and (b) until the measured combined aberration indicator reaches a predetermined combined aberration indicator target thereby achieving accurate alignment.