公开(公告)号：EP3164880A1

公开(公告)日：2017-05-10

申请号：EP15814328.9

申请日：2015-07-01

Applicant: Atomnaut Inc.

Inventor： LIDDICOAT, Peter V.

IPC: H01J37/26

CPC classification number: H01J37/285 ,  H01J37/226 ,  H01J49/0004 ,  H01J49/40 ,  H01J2237/04 ,  H01J2237/05 ,  H01J2237/2067 ,  H01J2237/2855

Abstract: An imaging system that selectively alternates a first, non-destructive imaging mode and a second, destructive imaging mode to analyze a specimen so as to determine an atomic structure and composition of the specimen is provided. The field ionization mode can be used to acquire first images of ionized atoms of an imaging gas present in a chamber having the specimen disposed therein, and the field evaporation mode can be used to acquire second images of ionized specimen atoms evaporated from a surface of the specimen with the imaging gas remaining in the chamber. The first and second image data can be analyzed in real time, during the specimen analysis, and results can be used to dynamically adjust operating parameters of the imaging system.

Abstract translation: 一种成像系统做选择性交替的第一，非破坏性成像模式和第二，破坏性成像模式，以确定性矿原子结构和试样的组合物被提供到分析样品。 的场电离模式可以被用于获取存在于具有设置在其中的样品的腔室的成像气体的离子化的原子的第一图像，并且所述场蒸发模式可被用于获取来自的表面蒸发电离样品原子的第二图像 与腔室中的气体成像剩余试样。 所述第一和第二图像数据可以实时分析，试样分析过程中，并且结果可以被用来动态地调整所述成像系统的操作参数。