公开(公告)号：WO2016061671A1

公开(公告)日：2016-04-28

申请号：PCT/CA2015/051051

申请日：2015-10-20

Applicant: AURORA CONTROL TECHNOLOGIES INC.

Inventor： AYRES, Gregory ,  MCDONALD, Steven

IPC: H01L21/66 ,  H01L31/028 ,  H01L31/18

CPC classification number: H01L31/1876 ,  G05B19/41875 ,  G05B2219/32182 ,  G05B2219/32191 ,  G05B2219/32194 ,  G05B2219/32195 ,  G05B2219/32196 ,  G05B2219/32198 ,  G05B2219/32201 ,  H01L31/04 ,  H01L31/18 ,  H01L31/1804

Abstract: The present invention provides methods and systems for manufacturing process control of photovoltaic products. Some embodiments relate to a method for tracking wafers for photovoltaic products with respect to which production tool processed them and their position within that production tool. Some embodiments relate to measuring and characterizing the critical-to-quality parameters of the partially-finished photovoltaic products emerging from the production tool in question. Some embodiments relate to display and visualization of the measured parameters on a computer screen, such that the parameters of each production unit can be directly observed in the context of which production tools processed them, which location within a specific production tool they were located in during processing, and which batch, or in the case of continuous processing, what time, the unit(s) was/where processed.

Abstract translation: 本发明提供了用于制造光伏产品的工艺控制的方法和系统。 一些实施例涉及用于跟踪用于光伏产品的晶片的方法，相对于哪个生产工具处理它们以及它们在该生产工具内的位置。 一些实施例涉及测量和表征从所述生产工具出现的部分完成的光伏产品的关键到质量参数。 一些实施例涉及在计算机屏幕上显示和可视化所测量的参数，使得每个生产单元的参数可以在生产工具处理它们的上下文中被直接观察到，即在它们所在的特定生产工具内的哪个位置 处理，哪个批次，或在连续处理的情况下，单位何时处理。

公开(公告)号：EP3210239A1

公开(公告)日：2017-08-30

申请号：EP15851917.3

申请日：2015-10-20

Applicant: Aurora Control Technologies Inc.

Inventor： AYRES, Gregory ,  MCDONALD, Steven

IPC: H01L21/66 ,  H01L31/028 ,  H01L31/18

CPC classification number: H01L31/1876 ,  G05B19/41875 ,  G05B2219/32182 ,  G05B2219/32191 ,  G05B2219/32194 ,  G05B2219/32195 ,  G05B2219/32196 ,  G05B2219/32198 ,  G05B2219/32201 ,  H01L31/04 ,  H01L31/18 ,  H01L31/1804

Abstract: The present invention provides methods and systems for manufacturing process control of photovoltaic products. Some embodiments relate to a method for tracking wafers for photovoltaic products with respect to which production tool processed them and their position within that production tool. Some embodiments relate to measuring and characterizing the critical-to-quality parameters of the partially-finished photovoltaic products emerging from the production tool in question. Some embodiments relate to display and visualization of the measured parameters on a computer screen, such that the parameters of each production unit can be directly observed in the context of which production tools processed them, which location within a specific production tool they were located in during processing, and which batch, or in the case of continuous processing, what time, the unit(s) was/where processed.

Abstract translation: 本发明提供了用于制造光伏产品的过程控制的方法和系统。 一些实施例涉及用于追踪用于生产工具加工它们的光电产品的晶片及其在该生产工具内的位置的方法。 一些实施例涉及测量和表征从所讨论的生产工具出现的部分完成的光伏产品的关键质量参数。 一些实施例涉及在计算机屏幕上显示和可视化所测量的参数，使得每个生产单元的参数可以在生产工具处理它们的环境中直接观察到，在它们所处的特定生产工具内的哪个位置 处理，以及哪个批次，或者在连续处理的情况下，单位何时/哪个处理。