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公开(公告)号：KR20120016287A
公开(公告)日：2012-02-23
申请号：KR20117030780
申请日：2010-05-21
Applicant: AURORA CONTROL TECHNOLOGIES INC
Inventor： DEANS GORDON , HEAVEN E MICHAEL
IPC: H01L31/18 , G06Q50/04 , G07C3/14 , H01L31/042
CPC classification number: G05B19/41875 , G05B2219/32182 , G05B2219/32191 , G05B2219/32194 , G05B2219/32195 , G05B2219/32196 , G05B2219/32198 , G05B2219/32201 , G05B2219/32212 , G05B2219/32218 , H01L31/18 , Y02P90/22 , Y02P90/86
Abstract: 광발전 제품을 제조하기 위한 방법 및 장치는 적합성에 대하여 생산 라인에서 각 제품을 평가하는 단계와, 그 단계에서 그 제품에 대한 평가 결과, 그 단계에서 예전 제품에 대한 평가 결과의 통계 분석과의 비교 결과, 또는 과거 단계의 예전 평가 결과를 그 단계에서 과거 제품에 대한 누적 평가 결과의 통계 분석과 비교한 결과에 따라서 등급을 지정하는 단계를 포함한다. 제품은 상기 등급에 따라 그룹으로서 처리하기 위해 그룹으로 연관될 수 있고, 하류 장비는 상기 그룹이 미리 정해진 공차 내에 들도록 상기 그룹의 등급에 따라 조정될 수 있다.
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公开(公告)号：TW201633556A
公开(公告)日：2016-09-16
申请号：TW104134234
申请日：2015-10-19
Applicant: 奧羅拉控制技術有限公司 , AURORA CONTROL TECHNOLOGIES INC.
Inventor： 艾爾斯格雷戈里 , AYRES, GREGORY , 麥克唐納史帝文 , MCDONALD, STEVEN
IPC: H01L31/18 , H01L31/028
CPC classification number: H01L31/1876 , G05B19/41875 , G05B2219/32182 , G05B2219/32191 , G05B2219/32194 , G05B2219/32195 , G05B2219/32196 , G05B2219/32198 , G05B2219/32201 , H01L31/04 , H01L31/18 , H01L31/1804
Abstract: 本發明提供用於光伏產品之製造程序控制之方法及系統。一些實施例與相對於哪一個用於處理晶圓之生產工具及該等晶圓在該生產工具內之位置而追蹤用於光伏產品之該等晶圓之方法相關。一些實施例與測量及特徵化部分完成之光伏產品之關鍵品質特性參數相關，該等部分完成之光伏產品之關鍵品質特性參數係自上述生產工具所產生。一些實施例與經測量參數之在電腦螢幕上之顯示及視覺化相關，使得可在哪一個用於處理該等單元之生產工具、該等單元在處理期間所位於之特定生產工具內之哪一個位置、及哪一個批次(或在持續處理之情況中)，及何時處理該單元(該等單元)之背景中，直接地觀察到每個生產單元之參數。
Abstract in simplified Chinese: 本发明提供用于光伏产品之制造进程控制之方法及系统。一些实施例与相对于哪一个用于处理晶圆之生产工具及该等晶圆在该生产工具内之位置而追踪用于光伏产品之该等晶圆之方法相关。一些实施例与测量及特征化部分完成之光伏产品之关键品质特性参数相关，该等部分完成之光伏产品之关键品质特性参数系自上述生产工具所产生。一些实施例与经测量参数之在电脑屏幕上之显示及可视化相关，使得可在哪一个用于处理该等单元之生产工具、该等单元在处理期间所位于之特定生产工具内之哪一个位置、及哪一个批次(或在持续处理之情况中)，及何时处理该单元(该等单元)之背景中，直接地观察到每个生产单元之参数。
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公开(公告)号：TW201614212A
公开(公告)日：2016-04-16
申请号：TW104128374
申请日：2015-08-28
Applicant: 奧羅拉控管科技公司 , AURORA CONTROL TECHNOLOGIES INC.
Inventor： 布萊尼 史帝芬華倫 , BLAINE, STEPHEN WARREN
CPC classification number: G01N21/9501 , G01J3/0254 , G01J3/433 , G01N21/55 , G01N2201/06113 , G01N2201/062 , G01N2201/065 , H01L22/12 , H01L31/18
Abstract: 本發明揭示一種半導體材料之掺雜量的測量系統與方法，其藉由將自半導體材料反射的紅外線輻射導引進入一積分球體，並散射所接收的輻射及將部分輻射通過不同波長區間的通帶過濾器，再比對通過每個過濾器的能量值，並參照由已知摻雜量之晶圓所建立的一相關曲線，以計算取得該測量系統中之半導體材料的摻雜量。
Abstract in simplified Chinese: 本发明揭示一种半导体材料之掺杂量的测量系统与方法，其借由将自半导体材料反射的红外线辐射导引进入一积分球体，并散射所接收的辐射及将部分辐射通过不同波长区间的通带过滤器，再比对通过每个过滤器的能量值，并参照由已知掺杂量之晶圆所创建的一相关曲线，以计算取得该测量系统中之半导体材料的掺杂量。
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4.发明申请SYSTEM FOR MEASURING LEVELS OF RADIATION REFLECTING FROM SEMICONDUCTOR MATERIAL FOR USE IN MEASURING THE DOPANT CONTENT THEREOF 审中-公开用于测量半导体材料的辐射反射水平的系统，用于测量其中的掺杂物含量
公开(公告)号：WO2016029321A1
公开(公告)日：2016-03-03
申请号：PCT/CA2015/050829
申请日：2015-08-28
Applicant: AURORA CONTROL TECHNOLOGIES INC.
Inventor： BLAINE, Stephen Warren
CPC classification number: G01N21/9501 , G01J3/0254 , G01J3/433 , G01N21/55 , G01N2201/06113 , G01N2201/062 , G01N2201/065 , H01L22/12 , H01L31/18
Abstract: A system and method of non-contact measurement of the dopant content of semiconductor material by reflecting infrared (IR) radiation off of the material into an integrating sphere to scatter the received radiation and passing portions of the radiation through band pass filters of differing wavelength ranges, comparing the level of energy passed through each filter and calculating the dopant content by referencing a correlation curve made up of known wafer dopant content for that system.
Abstract translation: 通过将材料中的红外（IR）辐射反射到积分球中来对半导体材料的掺杂剂含量进行非接触测量的系统和方法，以散射所接收的辐射并使辐射的部分通过不同波长范围的带通滤波器 比较通过每个滤波器的能量水平，并通过参考由该系统的已知晶片掺杂剂含量组成的相关曲线来计算掺杂剂含量。
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5.发明申请
公开(公告)号：WO2011137512A1
公开(公告)日：2011-11-10
申请号：PCT/CA2011/000508
申请日：2011-05-03
Applicant: AURORA CONTROL TECHNOLOGIES INC. , HEAVEN, E. Michael , DEANS, Gordon Matthew , CADIEN, Kenneth , BLAINE, Stephen Warren
Inventor： HEAVEN, E. Michael , DEANS, Gordon Matthew , CADIEN, Kenneth , BLAINE, Stephen Warren
CPC classification number: H01L22/12 , G01N21/3563 , G01N21/9501 , H01L2924/0002 , H01L2924/00
Abstract: A system and method of non-contact measurement of the dopant content of semiconductor material by reflecting infrared (IR) radiation off of the material and splitting the radiation into two beams, passing each beam through pass band filters of differing wavelength ranges, comparing the level of energy passed through each filter and calculating the dopant content by referencing a correlation curve made up of known wafer dopant content for that system.
Abstract translation: 通过将红外（IR）辐射反射离开材料并将辐射分解成两束，将每个光束通过不同波长范围的通带滤光片，来对半导体材料的掺杂剂含量进行非接触式测量的系统和方法， 的能量通过每个滤波器并且通过参考由该系统的已知晶片掺杂剂含量组成的相关曲线来计算掺杂剂含量。
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Patent Agency Ranking6.发明申请MAPPING OF MEASUREMENT DATA TO PRODUCTION TOOL LOCATION AND BATCH OR TIME OF PROCESSING 审中-公开测量数据映射到生产工具位置和批处理或加工时间
公开(公告)号：WO2016061671A1
公开(公告)日：2016-04-28
申请号：PCT/CA2015/051051
申请日：2015-10-20
Applicant: AURORA CONTROL TECHNOLOGIES INC.
Inventor： AYRES, Gregory , MCDONALD, Steven
IPC: H01L21/66 , H01L31/028 , H01L31/18
CPC classification number: H01L31/1876 , G05B19/41875 , G05B2219/32182 , G05B2219/32191 , G05B2219/32194 , G05B2219/32195 , G05B2219/32196 , G05B2219/32198 , G05B2219/32201 , H01L31/04 , H01L31/18 , H01L31/1804
Abstract: The present invention provides methods and systems for manufacturing process control of photovoltaic products. Some embodiments relate to a method for tracking wafers for photovoltaic products with respect to which production tool processed them and their position within that production tool. Some embodiments relate to measuring and characterizing the critical-to-quality parameters of the partially-finished photovoltaic products emerging from the production tool in question. Some embodiments relate to display and visualization of the measured parameters on a computer screen, such that the parameters of each production unit can be directly observed in the context of which production tools processed them, which location within a specific production tool they were located in during processing, and which batch, or in the case of continuous processing, what time, the unit(s) was/where processed.
Abstract translation: 本发明提供了用于制造光伏产品的工艺控制的方法和系统。 一些实施例涉及用于跟踪用于光伏产品的晶片的方法，相对于哪个生产工具处理它们以及它们在该生产工具内的位置。 一些实施例涉及测量和表征从所述生产工具出现的部分完成的光伏产品的关键到质量参数。 一些实施例涉及在计算机屏幕上显示和可视化所测量的参数，使得每个生产单元的参数可以在生产工具处理它们的上下文中被直接观察到，即在它们所在的特定生产工具内的哪个位置 处理，哪个批次，或在连续处理的情况下，单位何时处理。
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公开(公告)号：EP2433311A1
公开(公告)日：2012-03-28
申请号：EP10777278.2
申请日：2010-05-21
Applicant: Aurora Control Technologies Inc.
Inventor： DEANS, Gordon , HEAVEN , E . Michael
CPC classification number: G05B19/41875 , G05B2219/32182 , G05B2219/32191 , G05B2219/32194 , G05B2219/32195 , G05B2219/32196 , G05B2219/32198 , G05B2219/32201 , G05B2219/32212 , G05B2219/32218 , H01L31/18 , Y02P90/22 , Y02P90/86
Abstract: Methods and apparatuses for manufacturing photovoltaic products include an assessment of each product in a production line for suitability, and assigning a grade based either on assessment of the product at that step, comparison to statistical analysis of assessment results of previous products at that step or comparison of previous assessment results of past steps compared to statistical analysis of cumulative assessment results of past products at those steps Products can be associated into groups for processing as a group based on the grades and downstream equipment can be adjusted based on the grade of the group to bring the group within predetermined tolerances.
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公开(公告)号：EP2567217A4
公开(公告)日：2016-03-09
申请号：EP11777046
申请日：2011-05-03
Applicant: AURORA CONTROL TECHNOLOGIES INC
Inventor： HEAVEN E MICHAEL , DEANS GORDON MATTHEW , CADIEN KENNETH , BLAINE STEPHEN WARREN
IPC: G01N21/3563 , G01N21/95 , H01L21/66
CPC classification number: H01L22/12 , G01N21/3563 , G01N21/9501 , H01L2924/0002 , H01L2924/00
Abstract: A system and method of non-contact measurement of the dopant content of semiconductor material by reflecting infrared (IR) radiation off of the material and splitting the radiation into two beams, passing each beam through pass band filters of differing wavelength ranges, comparing the level of energy passed through each filter and calculating the dopant content by referencing a correlation curve made up of known wafer dopant content for that system.
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9.发明公开MAPPING OF MEASUREMENT DATA TO PRODUCTION TOOL LOCATION AND BATCH OR TIME OF PROCESSING 审中-公开测量数据映射到生产工具位置和批次或处理时间
公开(公告)号：EP3210239A1
公开(公告)日：2017-08-30
申请号：EP15851917.3
申请日：2015-10-20
Applicant: Aurora Control Technologies Inc.
Inventor： AYRES, Gregory , MCDONALD, Steven
IPC: H01L21/66 , H01L31/028 , H01L31/18
CPC classification number: H01L31/1876 , G05B19/41875 , G05B2219/32182 , G05B2219/32191 , G05B2219/32194 , G05B2219/32195 , G05B2219/32196 , G05B2219/32198 , G05B2219/32201 , H01L31/04 , H01L31/18 , H01L31/1804
Abstract: The present invention provides methods and systems for manufacturing process control of photovoltaic products. Some embodiments relate to a method for tracking wafers for photovoltaic products with respect to which production tool processed them and their position within that production tool. Some embodiments relate to measuring and characterizing the critical-to-quality parameters of the partially-finished photovoltaic products emerging from the production tool in question. Some embodiments relate to display and visualization of the measured parameters on a computer screen, such that the parameters of each production unit can be directly observed in the context of which production tools processed them, which location within a specific production tool they were located in during processing, and which batch, or in the case of continuous processing, what time, the unit(s) was/where processed.
Abstract translation: 本发明提供了用于制造光伏产品的过程控制的方法和系统。 一些实施例涉及用于追踪用于生产工具加工它们的光电产品的晶片及其在该生产工具内的位置的方法。 一些实施例涉及测量和表征从所讨论的生产工具出现的部分完成的光伏产品的关键质量参数。 一些实施例涉及在计算机屏幕上显示和可视化所测量的参数，使得每个生产单元的参数可以在生产工具处理它们的环境中直接观察到，在它们所处的特定生产工具内的哪个位置 处理，以及哪个批次，或者在连续处理的情况下，单位何时/哪个处理。
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公开(公告)号：EP2433311A4
公开(公告)日：2013-01-09
申请号：EP10777278
申请日：2010-05-21
Applicant: AURORA CONTROL TECHNOLOGIES INC
Inventor： DEANS GORDON , HEAVEN E MICHAEL
CPC classification number: G05B19/41875 , G05B2219/32182 , G05B2219/32191 , G05B2219/32194 , G05B2219/32195 , G05B2219/32196 , G05B2219/32198 , G05B2219/32201 , G05B2219/32212 , G05B2219/32218 , H01L31/18 , Y02P90/22 , Y02P90/86
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