公开(公告)号：EP2329252A1

公开(公告)日：2011-06-08

申请号：EP09815770.4

申请日：2009-09-24

Applicant: B-Nano Ltd.

Inventor： SHACHAL, Dov ,  DE PICCIOTTO, Rafi

IPC: G01N23/00

CPC classification number: H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J2237/0245 ,  H01J2237/164 ,  Y10T29/4973

Abstract: A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing. The sealed housing defines a vacuumed space in which vacuum is maintained. The electron beam source is configured to generate an electron beam that propagates within the vacuumed space, interacts with the electron optic component and passes through the thin membrane. A first portion of the sealed housing is shaped to fit a space defined by non-vacuumed scanning electron microscope components that are maintained in a non-vacuum environment.

公开(公告)号：WO2014128699A1

公开(公告)日：2014-08-28

申请号：PCT/IL2014/050175

申请日：2014-02-18

Applicant: B-NANO LTD.

Inventor： SHACHAL, Dov ,  DE PICCIOTTO, Rafi

IPC: G01N23/04

CPC classification number: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24445 ,  H01J2237/2605

Abstract: A scanning electron microscope suitable for imaging samples in a non- vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.

Abstract translation: 一种适用于在非真空环境中成像样品的扫描电子显微镜，扫描电子显微镜包括位于保持在真空下的外壳内的电子源，设置在外壳开口处的电子透过膜，分隔外壳内的环境， 维持在真空和外壳外部的环境，其不被保持在真空下，电渗透膜不被电接地，并且至少一个非接地电极用作电子检测器。

公开(公告)号：WO2013183057A1

公开(公告)日：2013-12-12

申请号：PCT/IL2013/050489

申请日：2013-06-05

Applicant: B-NANO LTD.

Inventor： SHACHAL, Dov ,  DE PICCIOTTO, Rafi

IPC: G01N21/47

CPC classification number: G01N23/2252 ,  G01N2223/309

Abstract: A method for performing analysis of materials when present in a non- vacuum environment using an electron microscope, the method including generating first and second characteristic spectrum for a material by directing an electron beam from the electron microscope onto the material in respective first and second non-vacuum environments, in which respective first and second amounts of scattering of the electron beam takes place, collecting respective first and second X-rays emitted from the material and performing spectral analysis on the first and second X-rays, comparing the first and second characteristic spectra and noting peaks whose intensity increases with increased scattering, generating a scattering-compensated characteristic spectrum for the material from at least one of the first and second characteristic spectra by eliminating at least one peak whose intensity increases with increased scattering.

Abstract translation: 一种当使用电子显微镜存在于非真空环境中时进行材料分析的方法，该方法包括通过将电子束从电子显微镜引导到相应的第一和第二非离子表面上的材料上来产生材料的第一和第二特征谱 真空环境，其中发生电子束的相应的第一和第二量的散射，收集从材料发射的相应的第一和第二X射线，并对第一和第二X射线进行光谱分析，比较第一和第二X射线 特征光谱和注意峰，其强度随着散射的增加而增加，通过消除其强度随着增加的散射而增加的至少一个峰，从而从第一和第二特征光谱中的至少一个产生材料的散射补偿特性光谱。

公开(公告)号：WO2010035265A1

公开(公告)日：2010-04-01

申请号：PCT/IL2009/000926

申请日：2009-09-24

Applicant: B-NANO LTD. ,  SHACHAL, Dov ,  DE PICCIOTTO, Rafi

Inventor： SHACHAL, Dov ,  DE PICCIOTTO, Rafi

IPC: G01N23/00

CPC classification number: H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J2237/0245 ,  H01J2237/164 ,  Y10T29/4973

Abstract: A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing. The sealed housing defines a vacuumed space in which vacuum is maintained. The electron beam source is configured to generate an electron beam that propagates within the vacuumed space, interacts with the electron optic component and passes through the thin membrane. A first portion of the sealed housing is shaped to fit a space defined by non-vacuumed scanning electron microscope components that are maintained in a non-vacuum environment.

Abstract translation: 一种真空装置，包括：密封壳体，电子束源，电子光学部件，薄膜和检测器。 薄膜密封密封外壳的孔。 密封的壳体限定了真空保持的真空空间。 电子束源被配置为产生在真空空间内传播的电子束，与电子光学部件相互作用并通过薄膜。 密封壳体的第一部分被成形为适合保持在非真空环境中的非真空扫描电子显微镜部件限定的空间。

公开(公告)号：EP2959287A1

公开(公告)日：2015-12-30

申请号：EP14754707.9

申请日：2014-02-18

Applicant: B-Nano Ltd.

Inventor： SHACHAL, Dov ,  DE PICCIOTTO, Rafi

IPC: G01N23/04

CPC classification number: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24445 ,  H01J2237/2605

Abstract: A scanning electron microscope suitable for imaging samples in a non- vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.