公开(公告)号：DE3817009A1

公开(公告)日：1989-11-30

申请号：DE3817009

申请日：1988-05-19

Applicant: BASF AG

Inventor： SCHWALM REINHOLD DR ,  BINDER HORST DIPL ING ,  BOETTCHER ANDREAS DR

IPC: G03F7/004 ,  G03F7/039

Abstract: The invention relates to a radiation-sensitive mixture and to a process for the formation of relief patterns. The radiation-sensitive mixture contains (a) a polymeric binder which is insoluble in water and soluble in aqueous-alkaline solutions, and (b) an organic compound whose solubility in an aqueous-alkaline developer is increased by the action of acid and which contains at least one grouping cleavable by acid and additionally one grouping which forms a strong acid under the action of radiation, the polymeric binder (a) containing 5 to 35 mol% of copolymerised or co-condensed monomer units having acid-sensitive groupings, or the acid-sensitive groupings having been introduced by a polymer-analogous reaction. It is suitable for the formation of relief patterns.

公开(公告)号：DE4032162A1

公开(公告)日：1992-04-16

申请号：DE4032162

申请日：1990-10-10

Applicant: BASF AG

Inventor： SCHWALM REINHOLD DR ,  BINDER HORST DIPL ING

IPC: G03F7/004 ,  G03F7/039 ,  H01L21/027