公开(公告)号：JPH02154103A

公开(公告)日：1990-06-13

申请号：JP25799989

申请日：1989-10-04

Applicant: BASF AG

Inventor： KURIFUTON TSUIMAAMAN ,  HERUMUUTO REBUIN ,  KURAUSU BIIBERITSUHI ,  BUARUTAA BOTSUKU

IPC: G01B11/00 ,  G01B11/24 ,  G01B11/245

Abstract: PURPOSE: To achieve a high measurement accuracy by allowing a detector to have a portion for affecting brightness between a light emitting/receiving equipment and a reflector. CONSTITUTION: A measurement head has a scanning tip 2 as a detector of the shape and posture change of a mechanical part that is placed at a casing 1 so that it can be rocked. Also, to convert a mechanical measurement value into an electrical signal, a signal generator is provided in a casing 1, it consists of a light source and a light reception device that are mounted to the casing 1, and these mutually respond through a reflector 4. A light waveguide(LWL) is formed between the light source and the light receiving device. These are fixed to the casing 1 and have a lens 5 with a band-pass, namely the layer of a band-pass filter, for bringing a parallel luminous flux to an edge portion that is directed toward the reflector 4. Then, an edge portion further away from a measurement head is connected to the light source and the light reception device via an optical point, the change in light intensity at the LWL is converted into an electrical signal, and the signal is analyzed by a known method.