公开(公告)号：JPH01196728A

公开(公告)日：1989-08-08

申请号：JP31663688

申请日：1988-12-16

Applicant: BASF AG

Inventor： MIHIYAERU HITSUTSUFUERUTO ,  TOOMASU FUREHIEN ,  PEETAA HAIRUMAN ,  FUORUKAA KOTSUHO ,  KURUTO DERU ,  HANSUUYOOAHIMU HOFUMAN ,  UBUE NOBUATSUKU

IPC: G11B5/72 ,  G11B5/84

Abstract: PURPOSE: To improve wear resistance and corrosion resistance by forming a hydrogen-contg. amorphous carbon protective layer by vapor deposition while adding a hydrocarbon gas. CONSTITUTION: A ferromagnetic metal thin layer such as Co-P and a carbon protective layer (A) are formed on a nonmagnetic carrier to obtain the medium of the title. The layer (A) is a hydrogen-contg. amorphous carbon layer of 5-100nm thickness formed by vapor deposition which uses a carbon target, while simultaneously adding a hydrocarbon gas which is decomposed by the vapor deposition plasma to change into a vapor deposition gas. As for the vapor deposition, a carbon target DC magnetron vapor deposition method is preferably used, and acetylene is added by (1:0.05) to (1:1) partial pressure to the sputtering gas such as Ar.

公开(公告)号：JPS63209086A

公开(公告)日：1988-08-30

申请号：JP1972888

申请日：1988-02-01

Applicant: BASF AG

Inventor： UDO BEEMU ,  BUERUNAA REEZAA ,  KURUTO DERU ,  AKUSERU RIYUDEIGAA SHIYURUTSUE

IPC: G11B23/50 ,  C23C18/16