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公开(公告)号：RO62460A
公开(公告)日：1977-12-15
申请号：RO7286172
申请日：1972-11-20
Applicant: BASF AG
Inventor： WOELLHAF JOSEF , FALK ROLAND , SCHEFFEL DIETER , RICHER VOLKER , BALZ WERNER , WILLMAN PAUL
IPC: G11B5/82 , B05C11/08 , B05D1/00 , B05D1/40 , G03D5/04 , G11B5/842 , H01L21/027 , H01L21/304 , G11B5/84
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