Patent search ap:("BASF AG") AND inv:"RORUFU ZONBERUGAA" Page 1

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发明专利
THIN LAYER OF DISORIENTED ALUMINIUM NITRIDE MICROCRYSTAL FORMED ON A SURFACE AND METHOD OF FORMING IT 失效

公开(公告)号：JPH03122267A

公开(公告)日：1991-05-24

申请号：JP14172590

申请日：1990-06-01

Applicant: BASF AG

Inventor： KURAUSU HARUTO , HARUTOMUUTO HIBUSUTO , RORUFU ZONBERUGAA , HERUMUUTO SHIYUTAININGAA

IPC: C01B21/072 , C23C14/06

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