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公开(公告)号：AU622530B2
公开(公告)日：1992-04-09
申请号：AU5147790
申请日：1990-03-20
Applicant: BASF AG
Inventor： HICKEL WERNER , KNOLL WOLFGANG , ROTHENHAEUSLER BENNO
Abstract: The invention relates to a method for examination of surface structures which differ with respect to refractive index and/or height modulation of the surface, these surface structures being brought into a surface/plasmon field and scanned by means of surface/plasmon microscopy.
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公开(公告)号：FI901417A0
公开(公告)日：1990-03-21
申请号：FI901417
申请日：1990-03-21
Applicant: BASF AG
Inventor： HICKEL WERNER , KNOLL WOLFGANG , ROTHENHAEUSLER BENNO
IPC: G01B11/06 , G01B11/30 , G01N21/552 , G01N21/88 , G01B
Abstract: The invention relates to a method for examination of surface structures which differ with respect to refractive index and/or height modulation of the surface, these surface structures being brought into a surface/plasmon field and scanned by means of surface/plasmon microscopy.
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公开(公告)号：AU5147790A
公开(公告)日：1990-09-27
申请号：AU5147790
申请日：1990-03-20
Applicant: BASF AG
Inventor： HICKEL WERNER , KNOLL WOLFGANG , ROTHENHAEUSLER BENNO
Abstract: The invention relates to a method for examination of surface structures which differ with respect to refractive index and/or height modulation of the surface, these surface structures being brought into a surface/plasmon field and scanned by means of surface/plasmon microscopy.
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