公开(公告)号：JPH02181151A

公开(公告)日：1990-07-13

申请号：JP28316589

申请日：1989-11-01

Applicant: BASF AG

Inventor： ZON GUIENNKIMU ,  GEERUHARUTO HOFUMAN ,  RAINHORUTO SHIYUBUARUMU

IPC: G03F7/039 ,  G03F7/004 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE: To obtain a system having high activity and sensitive for radiation by using a specified malonic ester as a compd. to inhibit dissolution of a binder in an alkali soln. CONSTITUTION: This mixture consists of a binder or a binder mixture which is insoluble with water but soluble with an alkali soln., a compd. which produces strong acid by irradiation, and an org. compd. which inhibits dissolution of the binder or the binder mixture in an alkali soln. The org. compd. is a malonic ester expressed by formula I. In formula I, R and R are alkyl, cycloalkyl, aralkyl groups, R and R are hydrogen, halogens, alkyl, cycloalkyl, alkoxy, aralkyl groups, etc. Thus, a system which is sensitive for radiation and has high activity reproducibility and resolution can be obtd.

公开(公告)号：JPH02181150A

公开(公告)日：1990-07-13

申请号：JP27876689

申请日：1989-10-27

Applicant: BASF AG

Inventor： ZON GUIENNKIMU ,  GEERUHARUTO HOFUMAN ,  RAINHORUTO SHIYUBUARUMU ,  HORUSUTO BINDAA

IPC: G03F7/039 ,  C08F4/00 ,  G03F7/004 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE: To obtain a radiation sensitive system by adding a specified β-ketoacid ester as a compd. to inhibit a binder from dissolving in an alkali soln. CONSTITUTION: This mixture consists of a binder or a binder mixture which is insoluble with water but soluble with an alkali soln., a compd. which produces strong acid by irradiation, and an org. compd. which inhibits dissolution of the hinder or the hinder mixture in an alkali soln. The org. compd. is a β- ketoacid ester expressed by formula I. In formula I, R is an alkyl, cycloalkyl, aralkyl group or oxygen-contg. heteroring residue, R and R are hydrogen, halogens, alkyl, cycloalkyl, aralkyl groups, etc., and R and R or R and R may form a ring with -(CH2 )n , wherein (n) is 2 to 5. R is an alkyl, cycloalkyl, aryl group or -CH2 -CO-OR . Thereby, a system having sensitivity with radiation can be obtd. and the reproducibility and resolution can be improved.