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公开(公告)号：KR20200125934A
公开(公告)日：2020-11-05
申请号：KR20207024101
申请日：2019-02-21
Applicant: BASF SE
Inventor： HADZIC ADMIR , KAERKKAINEN ARI , PIRINEN SAMI , HANNU KUURE MILJA , LEIVO JARKKO , KUVAJA RAUNA LEENA , GORDON GRAEME , ASAKURA TOSHIKAGE , PSCHIRER NEIL GREGORY , YAMAMOTO HIROSHI
IPC: C03C17/30 , C03C17/25 , C08G77/20 , C08G77/58 , C09D183/04 , C09D183/14
Abstract: 본발명은, 준금속화합물을포함하는 2종의전구체조성물을제조하는단계; 및그 후에이들을배합하는단계이며, 여기서배합전 1종의전구체조성물을가수분해시키는단계를포함하는, 기판상에박막을제조하는방법에관한것이다. 본발명은추가로, 상기방법에의해수득가능한박막을포함하는물품및 다층구조물, 상기전구체조성물들을포함하는조성물, 상기전구체조성물들을포함하는부분들의키트, 및기판상에박막을제조하기위한상기조성물및 부분들의키트의용도에관한것이다.
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公开(公告)号：SG11201707505QA
公开(公告)日：2017-10-30
申请号：SG11201707505Q
申请日：2016-03-17
Applicant: BASF SE
Inventor： KÄRKKÄINEN ARI , HANNU-KUURE MILJA , HADZIC ADMIR , LEIVO JARKKO , JÄRVITALO HENNA , KUVAJA RAUNA-LEENA , GORDON GRAEME , PESONEN MATTI
IPC: C09D183/14 , G03F7/075
Abstract: The present invention provides a method for covering a substrate, and includes the following operations: (a) admixing at least four different silane monomers and at least one bi-silane to a first solvent(s) to form a mixture, with the proviso that at least one of the silane monomers or the bi-silane comprises an active group capable of achieving cross-linking to adjacent siloxane polymer chains of the siloxane polymer composition; (b) subjecting the mixture to an acid treatment so that the silane monomers are at least partially hydrolysed, and the hydrolysed silane monomers, the silane monomers and the bi-silane are at least partially polymerized and cross-linked; (c) optionally changing the first solvent to a second solvent; and (d) subjecting the mixture to further cross-linking of the siloxane polymer to achieve a predetermined degree of cross-linking, depositing the siloxane polymer composition on the substrate, and optionally curing the deposited siloxane polymer composition.
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公开(公告)号：PH12017501675A1
公开(公告)日：2018-03-12
申请号：PH12017501675
申请日：2017-09-13
Applicant: BASF SE
Inventor： KARKKAINEN ARI , HANNU-KUURE MILJA , HADZIC ADMIR , LEIVO JARKKO , JARVITALO HENNA , KUVAJA RAUNA-LEENA , GORDON GRAEME , PESONEN MATTI
IPC: C09D183/14 , G03F7/075
Abstract: The present invention relates to siloxane polymer compositions. In particular, the invention relates to siloxane polymer compositions which have suitable properties for use in a lithographic fabrication processes. The invention also relates to synthesis, polymerization and cross-linking of such compositions.
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公开(公告)号：AU2016232011A1
公开(公告)日：2017-10-05
申请号：AU2016232011
申请日：2016-03-17
Applicant: BASF SE
Inventor： KÄRKKÄINEN ARI , HANNU-KUURE MILJA , HADZIC ADMIR , LEIVO JARKKO , JÄRVITALO HENNA , KUVAJA RAUNA-LEENA , GORDON GRAEME , PESONEN MATTI
IPC: C09D183/14 , G03F7/075
Abstract: The present invention relates to siloxane polymer compositions. In particular, the invention relates to siloxane polymer compositions which have suitable properties for use in a lithographic fabrication processes. The invention also relates to synthesis, polymerization and cross-linking of such compositions.
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